Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Microstructure and plasma resistance of Y2O3 ceramics

Y2O3 세라믹스의 미세구조 및 플라즈마 저항성

  • Lee, Hyun-Kyu (Dept., of New Material Engineering, Chosun University) ;
  • Lee, Seokshin (Dept., of Mechanical Engineering, Chosun University) ;
  • Kim, Bi-Ryong (Dept., of New Material Engineering, Chosun University) ;
  • Park, Tae-Eon (Ecotechkorea Co., Ltd., Jeonnam Advanced Ceramics Center) ;
  • Yun, Young-Hoon (Dept., of Hydrogen & Fuel Cell Tech., Dongshin University)
  • 이현규 (조선대학교 신소재공학과) ;
  • 이석신 (조선대학교, 기계공학과) ;
  • 김비룡 (조선대학교 신소재공학과) ;
  • 박태언 ((주)에코텍코리아, 세라믹종합지원센터) ;
  • 윤영훈 (동신대학교 수소에너지학과)
  • Received : 2014.10.23
  • Accepted : 2014.12.05
  • Published : 2014.12.31
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Abstract

$Y_2O_3$ ceramic specimens were fabricated from the granular powder, obtained by spray drying process from the slurry. The slurry was prepared by mixing PVA binder, NaOH for Ph control, PEG and $Y_2O_3$ powder. The $Y_2O_3$ specimen was shaped in size of ${\phi}14mm$ and then sintered at $1650^{\circ}C$. The characteristics, microstructure, densities and plasma resistance of the $Y_2O_3$ specimens were investigated with the function of forming pressure and sintering time. $Y_2O_3$ specimens were exposed under the $CHF_3/O_2/Ar$ plasma, the dry etching treatment of specimens was carried out by the physical reaction etching of $Ar^+$ ion beam and the chemical reaction etching of $F^-$ ion decomposed from $CHF_3$. With increasing sintering time, $Y_2O_3$ specimens showed relatively high density and strong resistance in plasma etching test.

$Y_2O_3$ 세라믹 소결체를 제작하기 위해, $Y_2O_3$ 분말을 분산한 상태에서 슬러리에 pH 조절제인 NaOH를 첨가하였으며 결합제로는 PVA, 가소제로는 PEG를 첨가하여 열분무 건조 공정을 거쳐 $Y_2O_3$ 과립형 분말을 제조하였다. ${\phi}14mm$ 크기의 $Y_2O_3$ 세라믹 성형체를 성형하고, $1650^{\circ}C$의 온도에서 소결하여 $Y_2O_3$ 세라믹 소결체를 제작하였다. $Y_2O_3$ 소결체의 미세구조, 밀도 및 내플라즈마 특성이 성형압력 및 소결시간에 따라 분석되었다. $Y_2O_3$ 소결체는 $CHF_3/O_2/Ar$ 플라즈마에 노출시켜, $Ar^+$ 이온빔에 의한 물리적반응 식각과 $CHF_3$로부터 분해된, $F^-$ 이온에 의한 화학적반응 식각에 의한 건식 식각 처리가 이루어졌다. 본 연구에서 $Y_2O_3$ 소결체 소결시간의 증가에 따라, 비교적 높은 밀도를 나타내었으며, 내플라즈마 특성이 향상되는 것으로 나타났다.

Keywords

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