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높은 개구수를 가지는 대물렌즈의 비근축 회절효과

Non-Paraxial Diffraction Effect of High NA Objectives

  • 이종웅 (청주대학교 레이저광정보공학과)
  • Lee, Jong Ung (Department of Laser and Optical Information Engineering, Cheongju University)
  • 투고 : 2014.01.13
  • 심사 : 2014.01.28
  • 발행 : 2014.02.25

초록

유한광선추적과 곡선적합을 통하여 높은 개구수를 가지는 대물광학계의 비근축 동함수를 계산하는 방법에 대하여 연구하고, 원적외선용 대물렌즈와 무수차 타원경의 축상 상점의 결상에서 비근축 회절효과에 의한 MTF 저하를 분석하였다. 타원경은 원적외선용 대물렌즈와 동일한 근축 사양을 가지도록 구성되었다.

By using finite ray-tracing and curve fitting, a numerical method to determine the non-paraxial pupil function of a high-NA objective is presented. MTF degradations caused by the non-paraxial diffraction effect are analyzed for on-axial imaging of a far-infrared objective and aberration-free ellipsoidal mirror system. The ellipsoidal mirror system has the same paraxial specifications as the far-infrared objective.

키워드

참고문헌

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