한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제31권6호
  • /
  • Pages.491-495
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  • 2014
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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플렉시블 디스플레이용 박막 도포를 위한 초정밀 슬롯다이 코팅장비

High-Precision Slot-Die Coating Machine for Thin Films of Flexible Display

  • 최영만 (한국기계연구원 인쇄전자연구실) ;
  • 이승현 (한국기계연구원 인쇄전자연구실) ;
  • 조정대 (한국기계연구원 인쇄전자연구실)
  • Choi, Young-Man (Department of Printed Electronics, Korea Institute of Machinery and Materials) ;
  • Lee, Seung-Hyun (Department of Printed Electronics, Korea Institute of Machinery and Materials) ;
  • Jo, Jeongdai (Department of Printed Electronics, Korea Institute of Machinery and Materials)
  • 투고 : 2014.04.21
  • 심사 : 2014.05.13
  • 발행 : 2014.06.01
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초록

We developed a compact high-precision slot-die coating machine for thin-film deposition on a flexible substrate. For smooth and precise coating, air-bearing and linear motor system were employed to minimize velocity ripple. The gap control mechanism is specially designed to have repeatability of gap between nozzle and substrate under 1 ${\mu}m$. Due to extremely precise gap control, the machine can coat thin-films down to 50 nm with $200mm{\times}100mm$ size. A thin film of Ag nano-particle ink is coated for demonstration.

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참고문헌

  1. Faircloth, T., Innocenzo, J., and Lang, C., "43.3: Slot Die Coating for OLED Displays," SID 08 DIGEST, pp. 645-647, http://onlinelibrary.wiley.com/doi/10.18-89/1.3069746/pdf (Accessed 27 May 2014)
  2. Perez, E. B. and Carvalho, M. S., "Optimization of Slot-coating Processes: Minimizing the Amplitude of Film-thickness Oscillation," J. Eng. Math, Vol. 71, No. 1, pp. 91-108, 2011.
  3. Chin, C. P., Wu, H. S., and Wang, S. S., "Improved Coating Window for Slot Coating," Industrial & Engineering Chemistry Research, Vol 49, No. 8, pp. 3802-3809, 2010. https://doi.org/10.1021/ie801900t
  4. Ruschak, K. J., "Limiting Flow in a Pre-metered Coating Devices," Chemical Engineering Science, Vol. 31, No. 11, pp. 1057-1060, 1976. https://doi.org/10.1016/0009-2509(76)87026-1
  5. Higgins, B. G. and Scriven, L. E., "Capillary Pressure and Viscous Pressure Drop Set Bounds on Coating Bead Operability," Chemical Engineering Science, Vol. 35, No. 3, pp. 673-682, 1980. https://doi.org/10.1016/0009-2509(80)80018-2
  6. Sartor, L., "Slot Coating: Fluid Mechanics and Die Design," Ph.D. Thesis, Minneapolis, University of Minnesota, 1990.
  7. Lee, K. Y., Liu, L. D., and Liu, T. J., "Minimum Web Thickness in Extrusion Slot Coating," Chemical Engineering Science, Vol. 47, No. 7, pp. 1703-1713, 1992. https://doi.org/10.1016/0009-2509(92)85018-7
  8. Carvalho, M. S. and Kheshgi, H. S., "Low-flow Limit in Slot Coating: Theory and Experiments," AIChE Journal, Vol. 46, No. 10, pp. 1907-1917, 2000. https://doi.org/10.1002/aic.690461003
  9. Chang, Y. R., Chang, H. M., Lin, C. F., Liu, T. J., and Wu, P. Y., "Three Minimum Wet Thickness Regions of Slot Die Coating," Vol. 208, No. 1, pp. 222-230, 2007.
  10. Krebs, F. C., Gevorgyan, S. A., and Alstrup, J., "A Roll-to-roll Process to Flexible Polymer Solar Cells: Model Studies, Manufacture and Operational Stability Studies," Journal of Materials Chemistry, Vol. 19, No. 30, pp. 5442-5451, 2009. https://doi.org/10.1039/b823001c