Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Synthesis of High Purity Aluminum Nitride Nanopowder in Ammonia and Nitrogen Atmosphere by RF Induction Thermal Plasma

RF 유도결합 열 플라즈마를 이용한 암모니아와 질소분위기에서 고순도 AlN 나노 분말의 합성

  • Kim, Kyung-In (Icheon Branch, Korea Institute of Ceramic Engineering and Technology) ;
  • Choi, Sung-Churl (Department of Advanced Materials Science and Engineering, Hanyang University) ;
  • Kim, Jin-Ho (Icheon Branch, Korea Institute of Ceramic Engineering and Technology) ;
  • Hwang, Kwang-Taek (Icheon Branch, Korea Institute of Ceramic Engineering and Technology) ;
  • Han, Kyu-Sung (Icheon Branch, Korea Institute of Ceramic Engineering and Technology)
  • 김경인 (한국세라믹기술원 이천분원) ;
  • 최성철 (한양대학교 신소재공학부) ;
  • 김진호 (한국세라믹기술원 이천분원) ;
  • 황광택 (한국세라믹기술원 이천분원) ;
  • 한규성 (한국세라믹기술원 이천분원)
  • Received : 2014.02.14
  • Accepted : 2014.05.12
  • Published : 2014.05.31
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Abstract

High-purity aluminum nitride nanopowders were synthesized using an RF induction thermal plasma instrument. Ammonia and nitrogen gases were used as sheath gas to control the reactor atmosphere. Synthesized AlN nanopowders were characterized by XRD, SEM, TEM, EDS, BET, FTIR, and N-O analyses. It was possible to synthesize high-purity AlN nanoparticles through control of the ammonia gas flow rate. However, additional process parameters such as plasma power and reactor pressure had to be controlled for the production of high-purity AlN nanopowders using nitrogen gas.

Keywords

References

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