Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Microstructure and plasma resistance of Y2O3-BN composites

Y2O3-BN 복합체의 미세구조 및 내플라즈마 특성

  • Lee, Hyun-Kyu (Dept. of New Material Engineering, Chosun University) ;
  • Lee, Seokshin (Dept. of Mechanical Engineering, Chosun University) ;
  • Kim, Bi-Ryong (Dept. of New Material Engineering, Chosun University) ;
  • Park, Tae-Eon (Ecotechkorea Co., LTD, Jeonnam Advanced Ceramics Center) ;
  • Yun, Young-Hoon (Dept. of Hydrogen & Fuel Cell Tech., Dongshin University)
  • 이현규 (조선대학교 신소재공학과) ;
  • 이석신 (조선대학교 기계공학과) ;
  • 김비룡 (조선대학교 신소재공학과) ;
  • 박태언 ((주)에코텍코리아, 세라믹종합지원센터) ;
  • 윤영훈 (동신대학교 수소에너지학과)
  • Received : 2014.06.03
  • Accepted : 2014.06.18
  • Published : 2014.06.30
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Abstract

$Y_2O_3$-BN ceramic composites were fabricated from the slurries of yttria powder with average particle size of 3~10 ${\mu}m$. The slurry was fabricated by mixing PVA binder, NaOH for Ph control, PEG, BN powder and $Y_2O_3$ powder. The mixed $Y_2O_3$ powders were obtained by spray drying process from the slurry. The $Y_2O_3$-BN composite specimen was shaped in size of ${\O}14mm$ and then sintered at $1550^{\circ}C$ and $1600^{\circ}C$, respectively. The characteristics, microstructure, purities, densities, bulk resistance, thermal expansion, hardness and plasma resistance of the $Y_2O_3$-BN composites were investigated with the function of BN contents and sintering temperature.

$Y_2O_3$-BN 세라믹 복합체를 제작하기 위해서, 분말 입도 $3{\sim}10{\mu}m$인 $Y_2O_3$ 분말을 분산한 슬러리에 pH 조절제인 NaOH를 첨가하였으며 결합제로는 PVA, 가소제로는 PEG를, BN 분말과 혼합하고, 분무건조(spray drying)공정을 거쳐 $Y_2O_3$ 혼합 분말을 제조하였다. ${\O}14mm$ 크기의 $Y_2O_3$-BN 시편을 성형하고, $1550^{\circ}C$ 및 $1600^{\circ}C$에서 소결하여 $Y_2O_3$-BN 복합체를 제작하였다. BN 투입량과 소결온도의 변수에 따른 미세구조, 순도, 꺽임강도, 열팽창계수, 밀도, 체적저항, 내플라즈마 특성을 조사하였다.

Keywords

References

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