Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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High-Performance Multimodal Flexible Tactile Sensor Capable of Measuring Pressure and Temperature Simultaneously

압력과 온도측정 기능을 갖는 고성능 플렉시블 촉각센서

  • 장진석 (한국표준과학연구원 기반표준본부 질량힘센터) ;
  • 강태형 (한국표준과학연구원 기반표준본부 질량힘센터) ;
  • 송한욱 (한국표준과학연구원 기반표준본부 질량힘센터) ;
  • 박연규 (한국표준과학연구원 기반표준본부 질량힘센터) ;
  • 김민석 (한국표준과학연구원 기반표준본부 질량힘센터)
  • Received : 2014.04.14
  • Accepted : 2014.07.07
  • Published : 2014.08.01
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Abstract

This paper presents a high-performance flexible tactile sensor based on inorganic silicon flexible electronics. We created 100 nm-thick semiconducting silicon ribbons equally distributed with 1 mm spacing and $8{\times}8$ arrays to sense the pressure distribution with high-sensitivity and repeatability. The organic silicon rubber substrate was used as a spring material to achieve both of mechanical flexibility and robustness. A thin copper layer was deposited and patterned on top of the pressure sensing layer to create a flexible temperature sensing layer. The fabricated tactile sensor was tested through a series of experiments. The results showed that the tactile sensor is capable of measuring pressure and temperature simultaneously and independently with high precision.

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References

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