Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)
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Warpage Characteristics Analysis for Top Packages of Thin Package-on-Packages with Progress of Their Process Steps

공정 단계에 따른 박형 Package-on-Package 상부 패키지의 Warpage 특성 분석

  • Park, D.H. (Department of Materials Science and Engineering, Hongik University) ;
  • Jung, D.M. (Department of Materials Science and Engineering, Hongik University) ;
  • Oh, T.S. (Department of Materials Science and Engineering, Hongik University)
  • 박동현 (홍익대학교 공과대학 신소재공학과) ;
  • 정동명 (홍익대학교 공과대학 신소재공학과) ;
  • 오태성 (홍익대학교 공과대학 신소재공학과)
  • Received : 2014.06.10
  • Accepted : 2014.06.26
  • Published : 2014.06.30
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Abstract

Warpage of top packages to form thin package-on-packages was measured with progress of their process steps such as PCB substrate itself, chip bonding, and epoxy molding. The $100{\mu}m$-thick PCB substrate exhibited a warpage of $136{\sim}214{\mu}m$. The specimen formed by mounting a $40{\mu}m$-thick Si chip to such a PCB using a die attach film exhibited the warpage of $89{\sim}194{\mu}m$, which was similar to that of the PCB itself. On the other hand, the specimen fabricated by flip chip bonding of a $40{\mu}m$-thick chip to such a PCB possessed the warpage of $-199{\sim}691{\mu}m$, which was significantly different from the warpage of the PCB. After epoxy molding, the specimens processed by die attach bonding and flip chip bonding exhibited warpages of $-79{\sim}202{\mu}m$ and $-117{\sim}159{\mu}m$, respectively.

박형 package-on-package의 상부 패키지에 대하여 PCB 기판, 칩본딩 및 에폭시 몰딩과 같은 공정단계 진행에 따른 warpage 특성을 분석하였다. $100{\mu}m$ 두께의 박형 PCB 기판 자체에서 $136{\sim}214{\mu}m$ 범위의 warpage가 발생하였다. 이와 같은 PCB 기판에 $40{\mu}m$ 두께의 박형 Si 칩을 die attach film을 사용하여 실장한 시편은 PCB 기판의 warpage와 유사한 $89{\sim}194{\mu}m$의 warpage를 나타내었으나, 플립칩 공정으로 Si 칩을 PCB 기판에 실장한 시편은 PCB 기판과 큰 차이를 보이는 $-199{\sim}691{\mu}m$의 warpage를 나타내었다. 에폭시 몰딩한 패키지의 경우에는 DAF 실장한 시편은 $-79{\sim}202{\mu}m$, 플립칩 실장한 시편은 $-117{\sim}159{\mu}m$의 warpage를 나타내었다.

Keywords

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