Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A Passive Reaction Force Compensation Mechanism for a Linear Motor Motion Stage using an Additional Movable Mass

추가 이동 질량을 이용한 선형 모터용 반발력 보상 기구

  • Nguyen, DucCanh (Department of Mechanical Engineering, Graduate School, Soongsil University) ;
  • Ahn, HyeongJoon (Department of Mechanical Engineering, Soongsil University)
  • Received : 2014.05.12
  • Accepted : 2014.08.08
  • Published : 2014.10.01
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Abstract

Reaction force compensation (RFC) mechanism can relieve the vibration of base system caused by acceleration and deceleration of mover. In this paper, we propose a new passive RFC mechanism with a movable additional mass to reduce vibration of the system base as well as displacement of the magnet track. First, equation of motion for the new passive RFC mechanism is derived and simulated to tune design parameters such as masses and spring coefficients. Simulation results show that the vibration of the system base of the stage with the new RFC mechanism.

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References

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