Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Optical Straightness Measuring System Using a Ball-lens

볼렌즈를 이용한 광학식 진직도 측정시스템

  • Lee, Minho (Department of Mechanical Design and Mechatronics, Hanyang University) ;
  • Cho, Nahm-Gyoo (Department of Mechanical Engineering, Hanyang University)
  • 이민호 (한양대학교 기계설계.메카트로닉스공학과) ;
  • 조남규 (한양대학교 기계공학과)
  • Received : 2014.08.07
  • Accepted : 2014.11.06
  • Published : 2014.12.01
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Abstract

This paper proposes a simple method to improve a sensitivity of a straightness measurement system for a linear stage, which is applied to a system based on a geometric optic method. An optical system for this method is composed of a corner-cube retro-reflector, a ball-lens and a twodimensional position sensitive detector (2D PSD). The effectiveness of the proposed method was examined theoretically, and verified experimentally using a prototype measurement system. The results show that the measuring sensitivity was dependent on the size of the ball-lens and the setup position of PSD from the ball-lens, and that the proposed method is efficient method to improve the measuring sensitivity.

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References

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