Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지
DOI QR코드

DOI QR Code

Effect of Processing Parameters and Powder Size on Microstructures and Mechanical Properties of Y2O3 Coatings Fabricated by Suspension Plasma Spray

  • Kim, Sun-Joo (Engineering Ceramic Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Jung-Ki (Engineering Ceramic Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Oh, Yoon-Suk (Engineering Ceramic Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Seongwon (Engineering Ceramic Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Sung-Min (Engineering Ceramic Team, Korea Institute of Ceramic Engineering and Technology)
  • Received : 2015.08.07
  • Accepted : 2015.09.22
  • Published : 2015.11.30
Download PDF
⟨ Previous Next ⟩

Abstract

The suspension plasma spray (SPS) technique has been used to obtain dense $Y_2O_3$ coatings and to overcome the drawbacks of the conventional air plasma spray (APS). SPS uses suspensions containing micrometer or sub-micrometer sized powders dispersed in liquid media. In this study, microstructure developments and mechanical properties have been investigated as functions of particle size of source material and plasma processing parameters such as plasma power and stand-off distance. The microstructure of the coating was found to be highly related to the particle size and the plasma processing parameters, and it was directly reflected in the hardness and the adhesion strength. When fine powder (BET $16.4m^2/g$) was used as a raw material in the suspension, there was, with increasing stand-off distance, a change from a dense structure with a slightly bumpy surface to a porous structure with a cauliflower-like surface. On the other hand, when a coarse powder (BET $2.8m^2/g$) was used, the coating density was lower, with microscopic splats on the surface. Using fine $Y_2O_3$ powders, the coating layer with an optimum short stand-off distance showed a high hardness of approximately 90% of that of sintered $Y_2O_3$ and an adhesion strength several times higher than that of the coating by conventional APS.

Keywords

References

  1. R. C. M. B. M. Schaepkens, T. E. F. M. Standaert, G. S. Oehrleinb, and J. M. Cook, "Influence of Reactor Wall Conditions on Etch Processes in Inductuvely Coupled Fluorocarbon Plasmas," J. Vac. Sci. Technol. A, 16 [4] 2099-107 (1998).
  2. N. Ito, T. Moriya, F. Uesugi, M. Matsumoto, S. Liu, and Y. Kitayama, "Reduction of Particle Contamination in Plasma-Etching Equipment by Dehydration of Chamber Wall," Jpn. J. Appl. Phys. Part1, 47 [5] 3630-34 (2008). https://doi.org/10.1143/JJAP.47.3630
  3. S.-M Lee, Y.-S. Oh, and D.-M. Kim, "Plasma Resistance and Erosion Mechanism of Engineering Ceramics," Ceramist, 15 [5] 47-55 (2012).
  4. J. Iwasawa, R. Nishimizu, M. Tokita, M. Kiyohara, and K. Uematsu, "Plasma-Resistant Dense Yttrium Oxide Film Prepared by Aerosol Deposition Process," J. Am. Ceram. Soc., 90 [8] 2327-32 (2007). https://doi.org/10.1111/j.1551-2916.2007.01738.x
  5. H. Choi, K. Kim, H. Choi, S. Kang, J. Yun, Y. Shin, and T. Kim, "Plasma Resistant Aluminum Oxide Coatings for Semiconductor Processing Apparatus by Atmospheric Aerosol Spray Method," Surf. Coat. Technol., 205 S125-28 (2010). https://doi.org/10.1016/j.surfcoat.2010.06.046
  6. K.-B. Kim, D.-M. Kim, J.-K. Lee, Y.-S. Oh, H.-T. Kim, H.-S. Kim, and S.-M. Lee, "Erosion Behavior of YAG Ceramics under Fluorine Plasma and Their XPS Analysis," J. Korean Ceram. Soc., 46 [5] 456-61 (2009). https://doi.org/10.4191/KCERS.2009.46.5.456
  7. D.-M. Kim, S.-H. Lee, W. B. Alexander, K.-B. Kim, Y.-S. Oh, and S.-M. Lee, "X-Ray Photoelectron Spectroscopy Study on the Interaction of Yttrium-Aluminum Oxide with Fluorine-Based Plasma," J. Am. Ceram. Soc., 94 [10] 3455-59 (2011). https://doi.org/10.1111/j.1551-2916.2011.04589.x
  8. D.-M. Kim, Y.-S. Oh, S. Kim, H.-T. Kim, D.-S. Lim, and S.-M. Lee, "The Erosion Behaviors of $Y_2O_3$ and $YF_3$ Coatings under Fluorocarbon Plasma," Thin Solid Films, 519 [20] 6698-702 (2011). https://doi.org/10.1016/j.tsf.2011.04.049
  9. J. A. G. B. A. J. V. Roosmalen and S. J. H. Brader, "Dry Etching for VLSI," pp.39-69, Plenum Press, New York and London, 1991.
  10. Y. Kobayashi, "Current Status and Needs in the Future of Ceramics Used for Semiconductor Production Equipment (in Japanese)," Proceeding of the 37th Seminar on Hightemperature Ceramics, Ceram. Soc. Jpn., (2005).
  11. H. Kassner, R. Siegert, D. Hathiramani, R. Vassen, and D. Stoever, "Application of Suspension Plasma Spraying (SPS) for Manufacture of Ceramic Coatings," J. Therm. Spray Technol., 17 [1] 115-23 (2007). https://doi.org/10.1007/s11666-007-9144-2
  12. K. VanEvery, M. J. M. Krane, R. W. Trice, H. Wang, W. Porter, M. Besser, D. Sordelet, J. Ilavsky, and J. Almer, "Column Formation in Suspension Plasma-Sprayed Coatings and Resultant Thermal Properties," J. Therm. Spray Technol., 20 [4] 817-28 (2011). https://doi.org/10.1007/s11666-011-9632-2
  13. S. Gong, K. VanEvery, H. Wang, and R. W. Trice, "Microstructure and Thermal Properties of Inflight Rare-Earth Doped Thermal Barriers Prepared by Suspension Plasma Spray," J. Eur. Ceram. Soc., 34 [5] 1243-53 (2014). https://doi.org/10.1016/j.jeurceramsoc.2013.11.016
  14. X. Qin, G. Zhou, H. Yang, J. I. Wong, J. Zhang, D. Luo, S. Wang, J. Ma, and D. Tang, "Fabrication and Plasma Resistance Properties of Transparent YAG Ceramics," Ceram. Int., 38 [3] 2529-935 (2012). https://doi.org/10.1016/j.ceramint.2011.11.023
  15. C. Delbos, J. Fazilleau, V. Rat, J. F. Coudert, P. Fauchais, and B. Pateyron, "Phenomena Involved in Suspension Plasma Spraying Part 2: Zirconia Particle Treatment and Coating Formation," Plasma Chem. Plasma. P., 26 [4] 393-414 (2006). https://doi.org/10.1007/s11090-006-9020-8
  16. L. Latka, S. B. Goryachev, S. Kozerski, and L. Pawlowski, "Sintering of Fine Particles in Suspension Plasma Sprayed Coatings," Materials, 3 [7] 3845-66 (2010). https://doi.org/10.3390/ma3073845
  17. B. Guo, A. Harvey, S. H. Risbud, and I. M. Kennedy, "The Formation of Cubic and Monoclinic $Y_2O_3$ Nanoparticles in a Gas-Phase Flame Process," Phil. Mag. Lett., 86 [7] 457-67 (2006). https://doi.org/10.1080/09500830600871194
  18. H. M. J. Kitamura, K. Sato, Gifu, Z. Tang, and A. Burgess, "Crystal and Micro Structures of Plasma Sprayed Yttrium Oxide Coatings by Axial Injection of Fine Powder Slurries," Proceedings of the International Thermal Spray Conference, 567-72 (2010).
  19. J. W. Singh and D. E. Wolfe, "Review Nano and Macrostructured Component Fabrication by Electron Beam-Physical Vapor Deposition (EB-PVD)," J. Mater. Sci-Mater. M., 20 [4] 677-95 (2005).
  20. D.-M. Kim, S.-Y. Yoon, K.-B. Kim, H.-S. Kim, Y.-S. Oh, and S.-M. Lee, "Plasma Resistances of Yttria Deposited by EBPVD Method," J. Korean Ceram. Soc., 45 [11] 707-12 (2008). https://doi.org/10.4191/KCERS.2008.45.1.707
  21. I. A. Behera and S. C. Mishra, "Dependence of Adhesion Strength of Plasma Spray on Coating Surface Properties," Mater. Metall. Eng., 2 [1] 23-30 (2012).
  22. R. Vert, D. Chicot, C. Dublanche-Tixier, E. Meillot, A. Vardelle, and G. Mariaux, "Adhesion of YSZ Suspension Plasma-sprayed Coating on Smooth and Thin Substrates," Surf. Coat. Technol., 205 [4] 999-1003 (2010). https://doi.org/10.1016/j.surfcoat.2010.07.090
  23. P. Fauchais, R. Etchart-Salas, V. Rat, J. F. Coudert, N. Caron, and K. Wittnann-Teneze, "Parameters Controlling Liquid Plasma Spraying: Solutions, Sols, or Suspension," J. Therm. Spray Technol., 17 [1] 31-59 (2008). https://doi.org/10.1007/s11666-007-9152-2
  24. X. Chen and E. Pfender, "Effect of the Knudsen Number on Heat Transfer to a Particle Immersed into a Thermal Plasma," Plasma Chem. Pasma P. 3 [1] 97-113 (1983). https://doi.org/10.1007/BF00566030
  25. P. Fauchasis and A. Vardelle, "Solution and Suspension Plasma Spraying of Nanostructure Coatings," Advanced Plasma Spray Applications, pp.149-188, In Tech, 2012.

Cited by

  1. The Effects of Water Addition on the Color and Crystalline Phase of Y2O3 Coatings Fabricated by Plasma Suspension Spray vol.53, pp.6, 2016, https://doi.org/10.4191/kcers.2016.53.6.641
  2. Effect of Deposition Parameter and Mixing Process of Raw Materials on the Phase and Structure of Ytterbium Silicate Environmental Barrier Coatings by Suspension Plasma Spray Method vol.24, pp.6, 2017, https://doi.org/10.4150/KPMI.2017.24.6.437
  3. Yttirum Oxyfluoride 원료의 고상합성 및 서스펜션 플라즈마 스프레이 코팅 응용 vol.27, pp.12, 2015, https://doi.org/10.3740/mrsk.2017.27.12.710
  4. Environmental Barrier Coatings Made by Different Thermal Spray Technologies vol.9, pp.12, 2015, https://doi.org/10.3390/coatings9120784
  5. Yttrium Oxyfluoride Coatings Deposited by Suspension Plasma Spraying Using Coaxial Feeding vol.10, pp.5, 2015, https://doi.org/10.3390/coatings10050481
  6. Improvement of Process Reproducibility and Particle Reduction for YF3 Coating by Collision Assisted Sintering Process in Reactive Ion Etching vol.9, pp.6, 2015, https://doi.org/10.1149/2162-8777/aba4f2
  7. Effect of the Dispersion State in Y5O4F7 Suspension on YOF Coating Deposited by Suspension Plasma Spray vol.11, pp.7, 2015, https://doi.org/10.3390/coatings11070831