The Journal of Korean Institute of Communications and Information Sciences (한국통신학회논문지)

The Korean Institute of Commucations and Information Sciences (한국통신학회)
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Design of a Low Noise 6-Axis Inertial Sensor IC for Mobile Devices

모바일용 저잡음 6축 관성센서 IC의 설계

  • Kim, Chang Hyun (School of Electrical & Electronic Engineering Yonsei University) ;
  • Chung, Jong-Moon (School of Electrical & Electronic Engineering Yonsei University)
  • Received : 2014.10.16
  • Accepted : 2014.11.06
  • Published : 2015.02.28
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Abstract

In this paper, we designed 1 chip IC for 3-axis gyroscope and 3-axis accelerometer used for various IoT/M2M mobile devices such as smartphone, wearable device and etc. We especially focused on analysis of gyroscope noise and proposed new architecture for removing various noise generated by gyroscope MEMS and IC. Gyroscope, accelerometer and geo-magnetic sensors are usually used to detect user motion or to estimate moving distance, direction and relative position. It is very important element to designing a low noise IC because very small amount of noise may be accumulated and affect the estimated position or direction. We made a mathematical model of a gyroscope sensor, analyzed the frequency characteristics of MEMS and circuit, designed a low noise, compact and low power 1 chip 6-axis inertial sensor IC including 3-axis gyroscope and 3-axis accelerometer. As a result, designed IC has 0.01dps/${\sqrt{Hz}}$ of gyroscope sensor noise density.

본 논문에서는 최근 스마트폰이나 웨어러블 디바이스처럼 IoT/M2M 을 위한 여러 종류의 모바일 기기에 사용되는 센서 중에서 각속도를 검출하는데 사용되는 3축 자이로스코프 센서 IC와 가속도를 검출하는데 사용되는 3축 가속도 센서IC를 1 chip으로 하는 6축 관성센서 IC를 설계하였다. 특히 본 논문에는 자이로스코프 센서의 잡음을 분석하고 이를 효과적으로 제거하기 위한 구조를 제안하였다. 자이로스코프 센서는 가속도 센서, 지자기 센서와 더불어 사용자의 동작을 인식하고, 상대적 위치를 추정하기 위한 용도로 사용되는 센서이다. 위치를 추정할 때 사용되는 센서는 아주 작은 잡음이라도 오차로 누적되기 때문에, 정확도를 높이기 위해서 저잡음 IC 설계가 아주 중요한 요소이다. 본 논문에서는 자이로스코프 센서를 모델링하고 MEMS(micro-electro-mechanical system)와 회로에서 발생하는 잡음의 주파수 특성을 분석하여 이를 효과적으로 제거하기 위한 회로 구조를 제안하였으며, 초소형, 저전력 환경에서 사용 가능하면서 잡음 수준이 아주 낮은 3축 자이로스코프 센서와 3축 가속도 센서를 포함하는 6축 1 chip IC를 제작하였다. 제작된 IC는 자이로스코프 센서 잡음의 주요 원인이 되는 quadrature error를 효과적으로 제거하기 위한 회로 구조를 사용하였고, 0.18um CMOS공정을 이용하여 0.01dps/${\sqrt{Hz}}$의 자이로스코프 센서 잡음밀도를 가지는 IC를 제작하였다.

Keywords

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