한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제24권1호
  • /
  • Pages.38-42
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  • 2015
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  • 2508-5093(pISSN)
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  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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나노템플레이트 표면처리를 통한 나노패턴이 형성된 PDMS 탄성 스탬프 몰드 제작

Fabrication of Nanopatterned PDMS Elastic Stamp Mold Using Surface Treatment of Nanotemplate

  • Park, Yong Min (Department of Conversion System Engineering, Kangwon National University) ;
  • Seo, Sang Hyun (Department of Conversion System Engineering, Kangwon National University) ;
  • Seo, Young Ho (Department of Conversion System Engineering, Kangwon National University) ;
  • Kim, Byeong Hee (Department of Conversion System Engineering, Kangwon National University)
  • 투고 : 2014.08.07
  • 심사 : 2014.11.25
  • 발행 : 2015.02.15
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초록

Polydimethylsiloxane (PDMS) is a widely used material for replicating micro-structures because of its transparency, deformability, and easy fabrication. At the nanoscale, however, it is hard to fill a nanohole template with uncured PDMS. This paper introduces several simple methods by changing the surface energy of a nanohole template and PDMS elastomer for replicating 100nm-scale structures. In the case of template, pristine anodic aluminum oxide (AAO), hydrophobically treated AAO, and hydrophillically treated AAO are used. For the surface energy change of the PDMS elastomer, a hydrophilic additive and dilution solvent are added in the PDMS prepolymer. During the molding process, a simple casting method is used for all combinations of the treated template and modified PDMS. The nanostructured PDMS surface was investigated with a scanning electron microscope after the molding process for verification.

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참고문헌

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피인용 문헌

  1. 알루미늄 와이어 양극산화를 통한 튜브형 나노매쉬 제작 vol.34, pp.7, 2015, https://doi.org/10.7736/kspe.2017.34.7.501