Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Characterization of carbon microspheres grown by HVPE

HVPE 방법에 의해 성장된 탄소 마이크로구의 특성

  • Lee, Chanmi (Department of Electronic Material Engineering, Korea Maritime and Ocean University) ;
  • Jeon, Hunsoo (Department of Electronic Material Engineering, Korea Maritime and Ocean University) ;
  • Park, Minah (Department of Electronic Material Engineering, Korea Maritime and Ocean University) ;
  • Lee, Chanbin (Department of Electronic Material Engineering, Korea Maritime and Ocean University) ;
  • Yang, Min (Department of Electronic Material Engineering, Korea Maritime and Ocean University) ;
  • Yi, Sam Nyung (Department of Electronic Material Engineering, Korea Maritime and Ocean University) ;
  • Ahn, Hyung Soo (Department of Electronic Material Engineering, Korea Maritime and Ocean University) ;
  • Kim, Suck-Whan (Department of Physics, Andong National University) ;
  • Yu, Young Moon (LED-MCT R&BD Center, Pukyong National University) ;
  • Shin, Keesam (School of Nano & Advanced Materials Engineering, Changwoon National University) ;
  • Bae, Jong Seong (Korea Busan Center, Korea Basic Science Institute) ;
  • Lee, Hyo Suk (L&L. Co., Ltd.) ;
  • Sawaki, Nobuhiko (Department of Electrical and Electronics Engineering, AIT)
  • 이찬미 (한국해양대학교 전자소재공학과) ;
  • 전헌수 (한국해양대학교 전자소재공학과) ;
  • 박민아 (한국해양대학교 전자소재공학과) ;
  • 이찬빈 (한국해양대학교 전자소재공학과) ;
  • 양민 (한국해양대학교 전자소재공학과) ;
  • 이삼녕 (한국해양대학교 전자소재공학과) ;
  • 안형수 (한국해양대학교 전자소재공학과) ;
  • 김석환 (안동대학교 물리학과) ;
  • 유영문 (부경대학교 LED-MCT R&BD 센터) ;
  • 신기삼 (창원대학교 나노소재공학과) ;
  • 배종성 (한국기초과학연구소, 부산센터) ;
  • 이효석 ((주)엘앤엔) ;
  • Received : 2015.02.05
  • Accepted : 2015.03.20
  • Published : 2015.04.30
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Abstract

The carbon microspheres of a core-shell type were grown by the method of mixed-source hydride vapor phase epitaxy (HVPE). The surface and the cross section of the carbon microsphere grown by a new method were observed by scanning electron microscope (SEM). The characteristics of the carbon microsphere were investigated by X-ray photoelectron spectroscopy (XPS) and a high resolution-transmission electron microscope (HR-TEM). From these measurements, the diameters of carbon sphere were about few hundred micrometers. Furthermore, we show that the carbon microsphere of the core-shell type by mixed-source HVPE method can be grown successfully with the larger size than those of the existing one. This mixed-source HVPE method is proposed a new method for making of carbon microsphere.

혼합소스 HVPE 방법을 사용하여 탄소 마이크로구를 합성하였다. 소스 물질로는 그래파이트 보트에 담겨 진 Ga, Al을 사용하였고 반응가스로 암모니아, 염산, 질소 가스를 사용하였다. 탄소 마이크로구의 합성은 $1090^{\circ}C$에서 실시하였다. 질소 가스는 5000, 염산 가스는 80, 암모니아 가스는 2000 sccm으로 공급되며 반응 시간은 3시간으로 하였다. 탄소 마이크로구의 SEM 측정 결과 수백 ${\mu}m$의 지름을 가지고 매끈한 표면을 가지는 완전한 구형 모양을 가짐을 알 수 있었다. XPS 결과 탄소 마이크로구의 내부는 탄소 71.78 wt%, 산소 15.37 wt%, 황 0.32 wt%, 규소 1.97 wt%로 구성되어 있었다. 또한 TEM 분석을 통해 탄소 마이크로구가 비정질임을 알 수 있었다. 탄소 마이크로구가 합성된 것은 에피 성장 과정 중에 배양판과 같이 홈이 파져 있는 공간에서 가스 간의 흡착 반응에 의해 탄소 마이크로구의 성분들이 합성된 것으로 판단된다.

Keywords

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