한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제24권3호
  • /
  • Pages.270-277
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  • 2015
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  • 2508-5093(pISSN)
  • /
  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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전기장형 소형 주사전자현미경의 집속렌즈의 최적 설계에 대한 연구

A Study on the Optimum Design of the Condenser Lens of a Compact Electrostatic-Type SEM

  • Kim, Ki-Hwan (Graduate School of NID Fusion Technology, Seoul National University of Science & Technology) ;
  • Jang, Dong-Young (MSDE Program, Seoul National University of Science & Technology) ;
  • Park, Man-Jin (Research Center for Charged Particle Beam, KEMCTI)
  • 투고 : 2015.01.23
  • 심사 : 2015.04.23
  • 발행 : 2015.06.15
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초록

In this paper, we describe the production of a specific electrostatic-type scanning electron microscope based on miniaturization for application in other types of vacuum equipment. The initial configuration of the SEM starts with a minimal configuration that allows people to view sample images. After improving the stability of the SEM operation and resolution, we conducted experiments on identifying the characteristics and development of an einzel-type condenser lens with reference to the demagnification lens system of an SEM. The experiments were conducted at an acceleration voltage of 5 kV and we found the shape of the lens to be more reliable than a conventional lens. The lens was then added to improve the resolution in the nanometer region. The current measured on the sample was approximately 40 pA and its magnification was 4,000 times.

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참고문헌

  1. Maeng, H. Y., Kim, S. G., 2005, Design and Modal Analysis of FIB-SEM Compound Machine Structure, KSMTE, 2005:10 14-19.
  2. Kim, Y. T., 2008, Design and Optimization of Ion Beam Optics for Multi Ion Beam Instrument, A Thesis for a Master, Yonsei University, Republic of Korea.
  3. Ko, Y. H., 2006, A Study on the Assembly Aberration Analysis of Focused Ion Beam Column, A Thesis for a Master, Korea Polytechnic University Republic of Korea.
  4. Kim, H. S., Kim, D. W., 2003, Electro - optical Analysis of a Miniaturized Electrostatic Electron lens, OSK, 14:2 194-199.
  5. Lee, S. S., Her, j., 2008, Characteristic of Breakdown Voltage of Electrode Material in Vacuum, KIEE, 2008:10 101-102.
  6. Miyazaki, F., Inagawa, Y., 2005, Electrode Conditioning Characteristics in Vacuum under Impulse Voltage Application in Non-uniform Electric Field, IEEE, 12:1 17-23.
  7. Yoon, J. D., Yang, C. W., 2005, Scanning Electron Microscopy Analysis and X-ray Microanalysis, Cheongmoongak, Republic of Korea.
  8. Goldstein, J., Newbury, D., 1989, Scanning Electron Microscopy and X-ray Microanalysis, Plenum press, USA.
  9. Lee, R. E., 1993, Scanning Electron Microscopy and X-ray Microanalysis, PTR Prentice Hall, USA.
  10. Kim, K. H., Jang, D. Y., 2013, Observation of the Machined Surface Roughness through SEM, an Electrostatic Type, KSPE, 2013:5 1587-1588.