Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Vanadium-doped semi-insulating SiC single crystal growth by using porous graphite

다공성 흑연 소재를 이용한 바나듐 도핑된 반절연 SiC 단결정 성장의 특성 연구

  • Lee, Dong-Hun (Department of Advanced Materials Engineering, Dong-Eui University) ;
  • Kim, Hwang-Ju (Department of Advanced Materials Engineering, Dong-Eui University) ;
  • Kim, Young-Gon (Department of Advanced Materials Engineering, Dong-Eui University) ;
  • Choi, Su-Hun (Department of Advanced Materials Engineering, Dong-Eui University) ;
  • Park, Mi-Seon (Department of Advanced Materials Engineering, Dong-Eui University) ;
  • Jang, Yeon-Suk (Department of Advanced Materials Engineering, Dong-Eui University) ;
  • Lee, Won-Jae (Department of Advanced Materials Engineering, Dong-Eui University) ;
  • Jung, Kwang-Hee (Sapphire Technology) ;
  • Kim, Tae-Hee (Sapphire Technology) ;
  • Choi, Yi-Sik (Sapphire Technology)
  • Received : 2016.10.06
  • Accepted : 2016.11.04
  • Published : 2016.12.31
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Abstract

Vanadium-doped SiC crystals have been grown by using a porous graphite inner crucible filled with vanadium carbide (VC) and by using a porous graphite plate and SiC + VC powders, respectively. Semi-insulating SiC crystals were grown onto the 6H-SiC seed crystals by PVT (Physical Vapor Transport) method. The grown crystals were indicated to be 6H-SiC polytype by XRD. As result of SIMS analysis, vanadium-rich precipitates were observed when the vanadium concentration was relatively higher than the maximum solubility of vanadium ($3-5{\times}10^{17}cm^{-3}$) in vanadium-doped SiC crystals, which resulted in degradation of crystal quality.

본 연구에서는 다공성 흑연 캡슐에 Vanadium carbide(VC) 분말을 채워 성장시킨 방법과 SiC 분말과 VC 분말을 혼합하여 다공성 흑연판을 그 위에 덮은 후 성장시키는 방법으로 진행하였으며, 성장된 결정들은 여러 분석방법을 사용하여 각각의 특성들을 관찰하였다. 반절연 SiC 성장은 6H-SiC 종자 결정을 사용하여 PVT(Physical Vapor Transport)법으로 성장을 진행하였다. 반절연으로 성장된 SiC 결정은 XRD를 이용하여 6H-SiC인 것을 확인하였으며, SIMS 분석결과 바나듐 도핑 농도가 바나듐 용해의 한계값 보다 높을 경우 석출물이 발생되며, 결정 품질 저하의 원인이 됨을 확인할 수 있었다.

Keywords

References

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