The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on the Characteristics of NiInZnO/Ag/NiInZnO Multilayer Thin Films Deposited by RF/DC Magnetron Sputter According to the Thickness of Ag Insertion Layer

RF/DC 마그네트론 스퍼터로 제조한 NiInZnO/Ag/NiInZnO 다층박막의 Ag 금속 삽입층 두께 변화에 따른 특성 연구

  • Kim, Nam-Ho (Dept. of Electrical Engineering, Chonnam National University) ;
  • Kim, Eun-Mi (Center for Nano-Photonics Convergence Technology, Korea Institute of Industrial Technology) ;
  • Heo, Gi-Seok (Center for Nano-Photonics Convergence Technology, Korea Institute of Industrial Technology) ;
  • Yeo, In-Seon (Dept. of Electrical Engineering, Chonnam National University)
  • Received : 2016.10.07
  • Accepted : 2016.11.27
  • Published : 2016.12.01
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Abstract

Transparent, conductive electrode films, showing the particular characteristics of good conductivity and high transparency, are of considerable research interest because of their potential for use in opto-electronic applications, such as smart window, photovoltaic cells and flat panel displays. Multilayer transparent electrodes, having a much lower electrical resistance than widely-used transparent conducting oxide electrodes, were prepared by using RF/DC magnetron sputtering system. The multilayer structure consisted of three layers, [NiInZnO(NIZO)/Ag/NIZO]. The optical and electrical properties of the multilayered NIZO/Ag/NIZO structure were investigated in relation to the thickness of each layer. The optical and electrical characteristics of multilayer structures have been investigated as a function of the Ag and NIZO film thickness. High-quality transparent conductive films have been obtained, with sheet resistance of $9.8{\Omega}/sq$ for Ag film thickness of 8 nm. Also the multilayer films of inserted Ag 8 nm thickness showed a high optical transmittance above 93% in the visible range. The electrical and optical properties of the new multilayer films were mainly dependent on the thickness of Ag insertion layer.

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References

  1. K Badeker, "Concerning the electricity conductibility and the thermoelectric energy of several heavy metal bonds", Ann. Phys.(Leipzig), 1907.
  2. Ho-Chul Lee, O Ok Park, "Electron scattering mechanisms in indium-tin-oxide thin films: grain boundary and ionized impurity scattering", Vacuum, Vol. 75, No. 3, pp. 275-282, 2004. https://doi.org/10.1016/j.vacuum.2004.03.008
  3. Kwang-Hyuk Choi, Ho-Jun Nam, Jin-A Jeong, Sung-Woo Cho, Han-Ki Kim, Jae-Wook Kang, Do-Geun Kim, Woon-Jo Cho, "Highly flexible and transparent InZnSnOx/Ag/InZnSnOx multilayer electrode for flexible organic light emitting diodes", Appl. Phys. Lett., Vol. 92, 223302, 2008. https://doi.org/10.1063/1.2937845
  4. Eun-Ah Cho, "Characteriaztion of ZTO/Ag/ZTO multilayer electrode grown on glass substrate at room temperature", Chungbuk National University, 2012.
  5. M Fahland, P Karlsson, C Charton, "Low resisitivity transparent electrodes for displays on polymer substrates", Thin Solid Films, Vol. 392, No. 2, pp. 334-337, 2001. https://doi.org/10.1016/S0040-6090(01)01053-7
  6. Y.S Lee, S.Y Lee, "Development of next generation transparent electrodes using amorphous oxide semiconductor multilayer thin films", IEEK, pp. 886-889, 2014.11.
  7. Mohsen Ghasemi Varnamkhasti, Hamid Reza Fallah, Mojtaba Mostajaboddavati, Ali Hassanzadeh, "Influence of Ag thickness on electrical, optical and structural properties of nanocrystalline $MoO_3$/Ag/ITO multilayer for optoelectronic applications", Vacuum, Vol. 86, pp. 1318-1322, 2012.3. https://doi.org/10.1016/j.vacuum.2011.12.002
  8. Jin-A Jeong, Han-Ki Kim, "Low resistance and highly transparent ITO/Ag/ITO multilayer electrode using surface plasmon resonance of Ag layer for bulk-heterojunction organic solar cells", Solar Energy Materials and Solar Cells, Vol. 93, pp. 1801-1809, 2009. https://doi.org/10.1016/j.solmat.2009.06.014
  9. Hung-Wei Wu, Chien-Hsun Chu, Ru-Yuan Yang, Chin-Min Hsiung, "Effects of Mo Thickness on the Properties of AZO/Mo/AZO Multilayer Thin Films", World Academy of Science, Engineering & Technology, Issue 71, pp. 333, 2012.12.
  10. G. Haacke, "New figure of merit for transparent conductors", J. Appl. Phys. Vol. 47, pp. 4086-4089, 1976. https://doi.org/10.1063/1.323240