Journal of Korean Society of Industrial and Systems Engineering (산업경영시스템학회지)

Society of Korea Industrial and System Engineering (한국산업경영시스템학회)
권호 표지
DOI QR코드

DOI QR Code

A Study on Deterministic Utilization of Facilities for Allocation in the Semiconductor Manufacturing

반도체 설비의 효율성 제고를 위한 설비 할당 스케줄링 규칙에 관한 연구

  • Kim, Jeong Woo (System Engineering Team, SAMSUNG ELECTRONICS Co., Ltd.)
  • 김정우 (삼성전자 시스템기술팀)
  • Received : 2015.10.27
  • Accepted : 2016.03.24
  • Published : 2016.03.31
Download PDF
⟨ Previous Next ⟩

Abstract

Semiconductor manufacturing has suffered from the complex process behavior of the technology oriented control in the production line. While the technological processes are in charge of the quality and the yield of the product, the operational management is also critical for the productivity of the manufacturing line. The fabrication line in the semiconductor manufacturing is considered as the most complex part because of various kinds of the equipment, re-entrant process routing and various product devices. The efficiency and the productivity of the fabrication line may give a significant impact on the subsequent processes such as the probe line, the assembly line and final test line. In the management of the re-entrant process such as semiconductor fabrication, it is important to keep balanced fabrication line. The Performance measures in the fabrication line are throughput, cycle time, inventory, shortage, etc. In the fabrication, throughput and cycle time are the conflicting performance measures. It is very difficult to achieve two conflicting goal simultaneously in the manufacturing line. The capacity of equipment is important factor in the production planning and scheduling. The production planning consideration of capacity can make the scheduling more realistic. In this paper, an input and scheduling rule are to achieve the balanced operation in semiconductor fabrication line through equipment capacity and workload are proposed and evaluated. New backward projection and scheduling rule consideration of facility capacity are suggested. Scheduling wafers on the appropriate facilities are controlled by available capacity, which are determined by the workload in terms of the meet the production target.

Keywords

References

  1. Carrasco, J., Alptekin, S.E. and Krumme, L., Mixed Integer Programming Applied to Atepper Scheduling, Proceedings of the International Conference on Semiconductor Manufacturing Operational Modeling and Simulation, 1999, pp. 62-66.
  2. Chang, S., Pai, P., Yuan, K., Wang, B., and Li, R., Heuristic PAC Model from Hybrid MTO and MTS Production Environment, International Journal of Production Economics, 2003, Vol. 85, pp. 347-358. https://doi.org/10.1016/S0925-5273(03)00121-X
  3. Choi, S.W., Scheduling Algorithms for Minimizing Total Weighted Flowtime in Photolithography Workstation of FAB, Journal of the Society of Korea Industrial and Systems Engineering, 2012, Vol. 35, No. 1, pp. 79-86.
  4. Glassey, C.R. and Resende, M.G.C., A Scheduling Rule for Job Release in Demiconductor Fabrication, Operations Research Letters, 1998b, Vol. 7, pp. 213-217.
  5. Glassey, C.R. and Resende, M.G.C., Closed-loop Job Release Control for VLSI Circuit Manufacturing, IEEE Transactions on Semiconductor Manufacturing, 1998a, Vol. 1, No. 1, pp. 36-46.
  6. Kang, K.H. and Lee, Y.H., Make-to-order Scheduling in Foundry Semiconductor Fabrication, International Journal of Production Research, 2007, Vol. 45, No. 3, pp. 615-630. https://doi.org/10.1080/00207540600792416
  7. Kim, C.H., Determination of optimal production lot size when a production system is under constant surveillance, Journal of the Korean Institute of Plant Engineering, 2013, Vol. 18, No. 1, pp. 19-26.
  8. Kim, S., Yea, S.H., and Kim, B., Shift Scheduling for Stepper in the Semiconductor Wafer Fabrication Process, IIE Transactions, 2002, Vol. 34, pp. 167-177.
  9. Kim, S.H., Kim, J.W., and Lee, Y.H., Simulation-Based Optimal Production Planning Model Using Dynamic Lead Time Estimation, International Journal of Advanced Manufacturing Technology, 2014, Vol. 75, pp. 1381-1391. https://doi.org/10.1007/s00170-014-6209-5
  10. Leachman R.C., Kang, J.Y., and Lin, V., SLIM : Short Cycle Time and Low Inventory in Manufacturing at Samsung Electronics, Interfaces, 2002, Vol. 32, pp. 61-77. https://doi.org/10.1287/inte.32.1.61.15
  11. Lee, Y.H. and Kim, J.W., Daily Stepper Scheduling Rule in the Semiconductor Manufacturing for MTO Products, International Journal of Advanced Manufacturing Technology, 2011, Vol. 54, No. 1-4, pp. 323-336. https://doi.org/10.1007/s00170-010-2934-6
  12. Lee, Y.H. and Kim, T., Manufacturing Cycle Time Reduction Using Balance Control in the Semiconductor Fabrication Line, Production Planning and Control, 2001, Vol. 13, pp. 529-540.
  13. Lee, Y.H., Cho, H.M., Park, J.K., and Lee, B.K., Scheduling Simulator for Semiconductor Fabrication Line, IE Interfaces, 1999, Vol. 12, No. 3, pp. 437-447.
  14. Lee, Y.H., Park, J., and Kim, S., Experimental Study on Input and Bttleneck Scheduling for the Semicon ductor Fabrication line, IIE Transactions, 2001, Vol. 34, Issue. 2, pp. 179-190.
  15. Sigrid L.N. and Kai, A.O., Optimal and Heuristic Solutions for a Scheduling Problem Arising in an Foundry, Computer and Operations Research, 2005, Vol. 32, pp. 2351-2382. https://doi.org/10.1016/j.cor.2004.03.007
  16. Spearman, M.L., Woodruff, D.L., and Hopp, W.J., CONWIP : A Pull Alternative to Kanban, International Journal of Prouction Research, 1990, Vol. 28, No. 5, pp. 879-894. https://doi.org/10.1080/00207549008942761
  17. Wein, L.M., Shceduing Semiconductor Wafer Fabrication, IEEE Transactions on Semiconductor Manufacturing, 1998, Vol. 1, No. 3, pp. 115-129.

Cited by

  1. 다수의 인공위성-지상국 간 통신 스케줄 최적화 모형 vol.41, pp.1, 2016, https://doi.org/10.11627/jkise.2018.41.1.039
  2. Operation Scheduling in a Commercial Building with Chiller System and Energy Storage System for a Demand Response Market vol.19, pp.8, 2016, https://doi.org/10.5762/kais.2018.19.8.312
  3. 디스플레이 FAB 생산능력 예측 개선 사례 연구 vol.43, pp.2, 2016, https://doi.org/10.11627/jkise.2020.43.2.137