Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Recent Progress in the Nanoscale Additive Layer Manufacturing Process Using Two-Photon Polymerization for Fabrication of 3D Polymeric, Ceramic, and Metallic Structures

이광자 광중합 공정을 이용한 3차원 미세구조물 제작기술 동향

  • Ha, Cheol-Woo (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Lim, Tae-Woo (Divison of LCD, Samsung Display) ;
  • Son, Yong (Micro/Nanoscale manufacturing R&D Group, Korea Institute of Industrial Technology) ;
  • Park, Suk-Hee (Micro/Nanoscale manufacturing R&D Group, Korea Institute of Industrial Technology) ;
  • Park, Sang-Hu (School of Mechanical Engineering, ERC/NSDM, Pusan National University) ;
  • Yang, Dong-Yol (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 하철우 (한국과학기술원 기계항공시스템학부) ;
  • 임태우 (삼성디스플레이 LCD사업부) ;
  • 손용 (한국생산기술연구원 마이크로나노공정그룹) ;
  • 박석희 (한국생산기술연구원 마이크로나노공정그룹) ;
  • 박상후 (부산대학교 기계공학부 / 정밀정형 및 금형가공연구소) ;
  • 양동열 (한국과학기술원 기계항공시스템학부)
  • Received : 2016.02.25
  • Accepted : 2016.03.17
  • Published : 2016.04.01
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Abstract

Recently, many studies have been conducted on the nano-scale fabrication technology using twophoton- absorbed polymerization induced by a femtosecond laser. The nano-stereolithography process has many advantages as a technique for direct fabrication of true three-dimensional shapes in the range over several microns with sub-100 nm resolution, which might be difficult to obtain by using general nano/microscale fabrication technologies. Therefore, two-photon induced nano-stereolithography has been recently recognized as a promising candidate technology to fabricate arbitrary 3D structures with sub-100 nm resolution. Many research works for fabricating novel 3D nano/micro devices using the two-photon nano-stereolithography process, which can be utilized in the NT/BT/IT fields, are rapidly advancing.

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References

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