Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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Fabrication of Ultra-smooth 10 nm Silver Films without Wetting Layer

  • Devaraj, Vasanthan (Department of Physics, Chungnam National University) ;
  • Lee, Jongmin (Department of Physics, Chungnam National University) ;
  • Baek, Jongseo (Department of Physics, Chungnam National University) ;
  • Lee, Donghan (Department of Physics, Chungnam National University)
  • Received : 2016.01.25
  • Accepted : 2016.02.15
  • Published : 2016.03.30
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Abstract

Using conventional deposition techniques, we demonstrate a method to fabricate ultra-smooth 10 nm silver films without using a wetting layer or co-depositing another material. The argon working pressure plays a crucial role in achieving an excellent surface flatness for silver films deposited by DC magnetron sputtering on an InP substrate. The formation of ultra-smooth silver thin films is very sensitive to the argon pressure. At the optimum deposition condition, a uniform silver film with an rms surface roughness of 0.81 nm has been achieved.

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References

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