한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제33권7호
  • /
  • Pages.579-586
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  • 2016
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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플렉셔 힌지 기반 6-자유도 초정밀 위치 결정 스테이지의 기구학 해석

Kinematic Analysis of a 6-DOF Ultra-Precision Positioning Stage Based on Flexure Hinge

  • 신현표 (동양미래대학교 로봇자동화공학부) ;
  • 문준희 (유한대학교 메카트로닉스과)
  • Shin, Hyun-Pyo (School of Robot and Automation Engineering, Dongyang Mirae University) ;
  • Moon, Jun-Hee (Department of Mechatronics, Yuhan University)
  • 투고 : 2015.12.26
  • 심사 : 2016.04.26
  • 발행 : 2016.07.01
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초록

This paper describes kinematic analysis of a 6-degrees-of-freedom (DOF) ultra-precision positioning stage based on a flexure hinge. The stage is designed for processes which require ultra-precision and high load capacities, e.g. wafer-level precision bonding/assembly. During the initial design process, inverse and forward kinematic analyses were performed to actuate the precision positioning stage and to calculate workspace. A two-step procedure was used for inverse kinematic analysis. The first step involved calculating the amount of actuation of the horizontal actuation units. The second step involved calculating the amount of actuation of the vertical actuation unit, given the the results of the first step, by including a lever hinge mechanism adopted for motion amplification. Forward kinematic analysis was performed by defining six distance relationships between hinge positions for in-plane and out-of-plane motion. Finally, the result of a circular path actuation test with respect to the x-y, y-z, and x-z planes is presented.

키워드

참고문헌

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