Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)
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Effects of Demolding Temperature on Formability and Optical Properties of Anti-reflective Nanostructure

반사방지 나노구조의 성형성과 광학적 특성에 대한 이형 온도의 영향

  • Yeo, N.E. (Department of Cogno-Mechatronics Engineering, Pusan National University) ;
  • Shim, Y.B. (Department of Opto-Mechatronics Engineering, Pusan National University) ;
  • Cho, S.U. (Department of Cogno-Mechatronics Engineering, Pusan National University) ;
  • Kim, D.I. (BK21+Nano-integrated Cognomechatronics Engineering, Pusan National University) ;
  • Kim, K.N. (Seo Yeong Co., Ltd.) ;
  • Jang, K.S. (National Nanofab Center) ;
  • Jeong, M.Y. (Department of Opto-Mechatronics Engineering, Pusan National University)
  • 여나은 (부산대학교 인지메카트로닉스공학과) ;
  • 심영보 (부산대학교 광메카트로닉스공학과) ;
  • 조상욱 (부산대학교 인지메카트로닉스공학과) ;
  • 김두인 (부산대학교 BK21+나노융합인지메카트로닉스공학 사업단) ;
  • 김기남 ((주)서영) ;
  • 장경수 (나노종합기술원) ;
  • 정명영 (부산대학교 광메카트로닉스공학과)
  • Received : 2016.06.15
  • Accepted : 2016.06.27
  • Published : 2016.06.30
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Abstract

In this study, effects of demolding temperature (DT) on the formability and optical properties were evaluated in order to optimize thermal nanoimprint lithography for anti-reflective film. Characterization on optical property showed that optical performance was gradually enhanced as the DT increased up to $70^{\circ}C$ while the transmittance and the reflectance was degraded as the DT increased further to $100^{\circ}C$. In addition, similar behavior was observed from formability analysis. It was contributed to the formation of free volume and viscose flow. Therefore, it was concluded that the formability and optical property are highly influenced by the formation of free volume and viscous flow of polymer depending on the DT.

본에서는 저반사 나노구조 필름의 열 나노임프린트 공정 최적화를 위해 나노구조의 성형성과 광학적 특성에 대한 이형 온도의 영향을 평가하였다. 이형 온도에 따른 광학적 특성을 평가한 결과 $70^{\circ}C$까지는 이형 온도가 증가함에 따라 투과율과 반사율 특성이 향상되는 거동을 보였으나 그 이후에는 오히려 투과율이 감소하고 반사율이 증가하는 경향을 보였다. 이와 같은 이형온도에 따른 거동은 성형성에도 유사하게 관찰되었으며 자유체적 형성과 고분자 유동에 의한 것으로 보인다. 따라서, 이형 온도에 따라 고분자의 유동과 자유체적의 형성에 의한 패턴의 성형성이 결정되며, 이로 인해 광학적 특성에 영향을 줄 수 있음을 확인하였다.

Keywords

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