Particle and aerosol research (한국입자에어로졸학회지)

Korean Association for Particle and Aerosol Research (한국입자에어로졸학회)
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Development of Aerosol-LIBS (Laser Induced Breakdown Spectroscopy) for Real-time Monitoring of Process-induced Particles

공정 중 발생 오염입자 실시간 모니터링을 위한 에어로졸-레이저 유도 플라즈마 분광분석 시스템 개발

  • Kim, Gibaek (School of Earth Sciences and Environmental Engineering, Gwangju Institute of Science and Technology) ;
  • Kim, Kyoungtae (Manufacturing Engineering Team, Memory Division, Samsung Electronics Co., LTD.) ;
  • Maeng, Hyunok (School of Earth Sciences and Environmental Engineering, Gwangju Institute of Science and Technology) ;
  • Lee, Hae Bum (School of Earth Sciences and Environmental Engineering, Gwangju Institute of Science and Technology) ;
  • Park, Kihong (School of Earth Sciences and Environmental Engineering, Gwangju Institute of Science and Technology)
  • 김기백 (광주과학기술원 지구.환경공학부) ;
  • 김경태 (삼성전자 메모리 Manufacturing Engineering Team) ;
  • 맹현옥 (광주과학기술원 지구.환경공학부) ;
  • 이해범 (광주과학기술원 지구.환경공학부) ;
  • 박기홍 (광주과학기술원 지구.환경공학부)
  • Received : 2016.07.06
  • Accepted : 2016.09.24
  • Published : 2016.09.30
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Abstract

The laser-induced breakdown spectroscopy (LIBS) has been used for rapid detection of elemental compositions of various materials in multi-media (solid, liquid, gas, and aerosols). In this study, the aerosol-LIBS has been developed for real-time monitoring of process-induced particles produced during the semiconductor manufacturing. The developed aerosol-LIBS mainly consists of laser, optics, spectrometer, and aerosol chamber. A new aerosol chamber was constructed for the aerosol-LIBS to be applied for various semiconductor manufacturing process, including exhaust tubes, and low pressure and high temperature chamber. The aerosol-LIBS was evaluated by using laboratory generated aerosols for detection of various elements. As a result, P, Fe, Mg, Cu, Co, Ni, Ca, Na, and K emission lines were successfully detected by the aerosol-LIBS. Further evaluation of the aerosol-LIBS is being conducted.

Keywords

References

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