Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
권호 표지
DOI QR코드

DOI QR Code

Effect of Inductively Coupled Plasma on the Microstructure, Structure and Mechanical Properties of VN Coatings

유도결합 플라즈마 파워가 VN 코팅막의 미세구조, 결정구조 및 기계적 특성에 미치는 영향에 관한 연구

  • Chun, Sung Yong (Department of Advanced Materials Science and Engineering Mokpo National University) ;
  • Lee, So Yeon (Department of Advanced Materials Science and Engineering Mokpo National University)
  • 전성용 (목포대학교 신소재공학과) ;
  • 이소연 (목포대학교 신소재공학과)
  • Received : 2016.08.09
  • Accepted : 2016.08.26
  • Published : 2016.08.31
Download PDF
⟨ Previous Next ⟩

Abstract

The effects of ICP (Inductively Coupled Plasma) power, ranging from 0 to 200 W, on the crystal structure, microstructure, surface roughness and mechanical properties of magnetron sputtered VN coatings were systematically investigated with FE-SEM, AFM, XRD and nanoindentation. The results show that ICP power has a significant influence on coating microstructure and mechanical properties of VN coatings. With the increasing of ICP power, coating microstructure evolves from a porous columnar structure to a highly dense one. Average crystal grain size of single phase cubic fcc VN coatings was decreased from 10.1 nm to 4.0 nm with increase of ICP power. The maximum hardness of 28.2 GPa was obtained for the coatings deposited at ICP power of 200 W. The smoothest surface morphology with Ra roughness of 1.7 nm was obtained from the VN coating sputtered at ICP power of 200 W.

Keywords

References

  1. S. Y. Chun, "A Comparative Study of TiN Coatings Deposited by DC and Pulsed DC Asymmetric Bipolar Sputtering," J. Kor. Inst. Surf. Eng. 44 (2011) 179-184. https://doi.org/10.5695/JKISE.2011.44.5.179
  2. S. Y. Chun and J. W. Beak," A Comparative Study of CrN Coatings Deposited by DC and Asymmetric Bipolar Pulsed DC Sputtering," J. Kor. Inst. Surf. Eng. 47 (2) (2014) 86-92. https://doi.org/10.5695/JKISE.2014.47.2.086
  3. S. Y. Chun and T. Y. Lee, "A Comparative Study of TiAlN Coatings Deposited by DC and Pulsed DC Asymmetric Bipolar Magnetron Sputtering," J. Kor. Inst. Surf. Eng., 47 (2014) 168-173. https://doi.org/10.5695/JKISE.2014.47.4.168
  4. U. Wiklund, B. Casas and N. Stavlid, "Evaporated vanadium nitride as a friction material in dry sliding against stainless steel," Wear 261 (2006) 2-8. https://doi.org/10.1016/j.wear.2005.09.003
  5. A. Matthews, S. Franklin and K. Holmberg, "Tribological coatings: contact mechanisms and selection," J. Phys. D. Appl. Phys. 40 (2007) 5463-5475. https://doi.org/10.1088/0022-3727/40/18/S07
  6. F. Rose, B. Marchon, V. Rawat, D. Pocker, Q.- F. Xiao and T. Iwasaki, "Ultrathin TiSiN overcoat protection layer for magnetic media," J. Vac. Sci. Technol. A29 (2011) 051502.
  7. M. Hoseini, A. Jedenmalm and A. Boldizar, "Tribological investigation of coatings for artificial joints," Wear 264 (2008) 958-966. https://doi.org/10.1016/j.wear.2007.07.003
  8. S. H. Kim, D. B. Asay and M. T. Dugger, "Isolated Congenital Alveolar Synechiae: Review of Literature and Case Report: A Case Report," Nano Today 2 (2007) 22-29.
  9. S. Veprek and M. J. G. Veprek-Heijman, "Industrial applications of superhard nanocomposite coatings," Surf. Coat. Technol. 202 (2008) 5063-5073. https://doi.org/10.1016/j.surfcoat.2008.05.038
  10. U. Wiklund, S. Rubino, K. Kádas, N. V. Skorodumova, O. Eriksson and S. Hedberg, "Experimental and theoretical studies on stainless steel transferonto a TiN-coated cutting tool," et al. Acta Mater. 59 (2011) 68-74. https://doi.org/10.1016/j.actamat.2010.09.005
  11. W. -D. Munz, D. B. Lewis, P. E. Hovsepian, C. Schonjahn, A. Ehiasarian and I.J. Smith, "Industrial scale manufactured superlattice hard PVD coatings," Surf. Eng. 17 (2001) 15-27. https://doi.org/10.1179/026708401101517557
  12. Fangfang Ge, Ping Zhu, Fanping Meng, Qunji Xue and Feng Huang, "Achieving very low wear rates in binary transition-metal nitrides: The case of magnetron sputtered dense and highly oriented VN coatings," Surf. Coat. Technol. 248 (2014) 81-90. https://doi.org/10.1016/j.surfcoat.2014.03.035
  13. J. C. Caicedo, G. Zambrano, W. Aperador and L. Escobar-Alarcon, "Mechanical and electrochemical characterization of vanadium nitride (VN) thin films," E. Camps Appl. Surf. Sci. 258 (2011) 312- 320. https://doi.org/10.1016/j.apsusc.2011.08.057
  14. O. Storz, H. Gasthuber, M. Woydt "Tribological properties of thermal-sprayed Magn'eli-type coatings with different stoichiometries ($TinO_2_{n-1}$)," Surf.Coat.Technol. 140 (2001) 76-81. https://doi.org/10.1016/S0257-8972(01)01024-6
  15. S. Y. Chun, "Effect of Inductively Coupled Plasma on the Microstructure, Structure and Mechanical Properties of NbN Coatings," J. Kor. Inst. Surf. Eng. 48 (2015) 205-210 https://doi.org/10.5695/JKISE.2015.48.5.205
  16. S. Y. Chun, "A Comparative Study of Superhard TiN Coatings Deposited by DC and Inductively Coupled Plasma Magnetron Sputtering," J. Kor. Inst. Surf. Eng. 46 (2013) 55-60. https://doi.org/10.5695/JKISE.2013.46.2.055
  17. G. Abadias, "Stress and preferred orientation in nitride-based PVD coatings," Surf. Coat. Technol. 202 (2008) 2223-2235. https://doi.org/10.1016/j.surfcoat.2007.08.029
  18. B. D. Cullity and S. R. Stock, "Elements of Xray Diffraction, 3rd Edition," Prentice-Hall, (2001) 5 167-176
  19. Ulf Helmersson, Martina Lattemann, Johan Bohlmark, Arutiun P. Ehiasarian, Jon Tomas Gudmundsson, Thin Sol. Films 513 (2006) 1-24. https://doi.org/10.1016/j.tsf.2006.03.033
  20. A. A. Elmustafa and D. S. Stone, "Nanoindentation and the indentation size effect: Kinetics of deformation and strain gradient plasticity," J. Mech. Phys. Sol. 51 (2003) 357-381. https://doi.org/10.1016/S0022-5096(02)00033-9