DOI QR코드

DOI QR Code

Development of Nanowire Patterning Process Using Microcontact Printing

마이크로컨택 프린팅을 이용한 나노와이어 패터닝 기술 개발

  • Jo, Sungjin (School of Energy Engineering, Kyungpook National University)
  • 조성진 (경북대학교 에너지공학부)
  • Received : 2016.08.16
  • Accepted : 2016.08.20
  • Published : 2016.09.01

Abstract

Recently, there has been much focus on the controlled alignment and patterning process of nanowires for nanoelectronic devices. A simple and effective method for patterning of highly aligned nanowires using a microcontact printing technique is demonstrated. In this method, nanowires are first directionally aligned by contact printing, following which line and space micropatterns of nanowire arrays are accomplished by microcontact printing with a micro patterned NOA mold.

Keywords

References

  1. W. Lu and C. M. Lieber, Nature Mater., 6, 841 (2007). [DOI: http://dx.doi.org/10.1038/nmat2028]
  2. K. Q. Penga, X. Wang, L. Lia, Y. Hua, and S. Lee, Nanotodaya, 8, 75 (2013). [DOI: http://dx.doi.org/10.1016/j.nantod.2012.12.009]
  3. A. M. Burke, D. J. Carrad, J. G. Gluschke, K. Storm, S. F. Svensson, H. Linke, L. Samuelson, and A. P. Micolich, Nano Lett., 15, 2836 (2015). [DOI: http://dx.doi.org/10.1021/nl5043243]
  4. J. Wallentin, N. Anttu, D. Asoli, M. Huffman, I. Aberg, M. H. Magnusson, G. Siefer, P. Fuss-Kailuweit, F. Dimroth, B. Witzigmann, H. Q. Xu, L. Samuelson, K. Deppert, and M. T. Borgstrom, Science, 339, 1057 (2013). [DOI: http://dx.doi.org/10.1126/science.1230969]
  5. I. J. Kim, B. H. Oh, J. H. Lee, and S. M. Koo, J. Korean Inst. Electr. Electron. Mater. Eng., 25, 91 (2012). [DOI: http://dx.doi.org/10.4313/JKEM.2012.25.2.91]
  6. B. Messer, J. H. Song, and P. D. Yang, J. Am. Chem. Soc., 122, 10232 (2000). [DOI: http://dx.doi.org/10.1021/ja002553f]
  7. D. Whang, S. Jin, Y. Wu, and C. M. Lieber, Nano Lett., 3, 1255 (2003). [DOI: http://dx.doi.org/10.1021/nl0345062]
  8. G. H. Yu, A. Y. Cao, and C. M. Lieber, Nat. Nanotechnol., 2, 372 (2007). [DOI: http://dx.doi.org/10.1038/nnano.2007.150]
  9. Z. Fan, J. C. Ho, Z. A. Jacobson, R. Yerushalmi, R. L. Alley, H. Razavi, and A. Javey, Nano Lett., 8, 20 (2008). [DOI: http://dx.doi.org/10.1021/nl071626r]
  10. M. J. Lee, N. Y. Lee, J. R. Lim, J. B. Kim, M. Kim, H. K. Baik, and Y. S. Kim, Adv. Mat., 18, 3115 (2006). [DOI: http://dx.doi.org/10.1002/adma.200601268]
  11. Y. Huang, X. F. Duan, Q. Q. Wei, and C. M. Lieber, Science, 291, 630 (2001). [DOI: http://dx.doi.org/10.1126/science.291.5504.630]