한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제25권5호
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  • Pages.368-372
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  • 2016
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  • 2508-5093(pISSN)
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  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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마이크로나노그레이팅 경질 몰드 모서리의 연속적 각인 소성가공 기반 유연 마이크로나노패턴의 고속 연속 제작 공정시스템 개발

Development of a High-throughput Micronanopatterning System Based on the Plastic Deformation Driven by Continuous Rigid Mold Edge Inscribing on Flexible Substrates

  • Lee, Seungjo (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Oh, Dong Kyo (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Park, Jaekyu (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Kim, Jeong Dae (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Lee, Jae Hyuk (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Ok, Jong G. (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology)
  • 투고 : 2016.09.12
  • 심사 : 2016.10.14
  • 발행 : 2016.10.15
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초록

In this study, we develop a novel high-throughput micronanopatterning system that can implement continuous mechanical pattern inscribing on flexible substrates using a rigid grating mold edge. We perform a conceptual design of the process principle, specific modeling, and buildup of a real system prototype. This research also carefully addresses several important issues related to processing and controlling, including precision motion, alignment, heating, and sensing to enable a successful micronanopatterning in a continuous and high-speed fashion. Various micronanopatterns with the desired profiles can be created by tuning the mold shape, temperature, force, and substrate material toward many potential applications involving electronics, photonics, displays, light sources, and sensors, which typically require a large-area and flexible configurations.

키워드

참고문헌

  1. Seo, J. H., Park, J. H., Kim, S.-I., Park, B. J., Ma, Z. Choi, J., Ju, B. K., 2014, Nanopatterning by Laser Interference Lithography: Applications to Optical Devices, J. Nanosci. Nanotech., 14:2 1521-1532. https://doi.org/10.1166/jnn.2014.9199
  2. Priimagi, A., Shevchenko, A., 2014, Azopolymer-Based Micro- and Nanopatterning for Photonic Applications, J. Polymer Sci. Part B. -Polymer Phys., 52:3 163-182. https://doi.org/10.1002/polb.23390
  3. Kim, H. N., Jiao, A. Hwang, N. S., Kim, M. S., Kang, D. H., Kim, D.-H., Suh, K.-Y., 2013, Nanotopography-guided tissue engineering and regenerative medicine, Adv. Drug Delivery Rev., 65:4 536-558. https://doi.org/10.1016/j.addr.2012.07.014
  4. Wang, Z. L., 2013, Triboelectric Nanogenerators as New Energy Technology for Self-Powered Systems and as Active Mechanical and Chemical Sensors, ACS Nano, 7:11 9533-9557. https://doi.org/10.1021/nn404614z
  5. Hong, J.-Y., Jang, J., 2012, Micropatterning of graphene sheets: recent advances in techniques and applications, J. Mater. Chem., 22:17 8179-8191. https://doi.org/10.1039/c2jm00102k
  6. Ok, J. G., Kwak, M. K., Huard, C. M., Youn, H. S., Guo, L. J., 2013, Photo Roll Lithography (PRL) for continuous and scalable patterning with application in flexible electronics, Adv. Mater., 25:45 6554-6561. https://doi.org/10.1002/adma.201303514
  7. Sreenivasan, S. V., 2008, Nanoscale manufacturing enabled by imprint lithography, MRS Bulletin, 33:9 854-863. https://doi.org/10.1557/mrs2008.181
  8. Dumond, J. J., Low, H. Y., 2012, Recent developments and design challenges in continuous roller micro- and nanoimprinting, J. Vac. Sci. Technol. B, 30:1 010801.
  9. Ok, J. G., Ahn, S. H., Kwak, M. K., Guo, L. J., 2013, Continuous and high-throughput nano-patterning methodologies based on mechanical deformation, J. Mater. Chem. C, 1:46 7681-7691. https://doi.org/10.1039/c3tc30908h
  10. Ahn, S. H., Guo, L. J., 2009, Dynamic nanoinscribing for continuous and seamless metal and polymer nanogratings, Nano Lett., 9:12 4392-4397. https://doi.org/10.1021/nl902682d
  11. Ok, J. G., Panday, A., Lee, T., Guo, L. J., 2014, Continuous fabrication of scalable 2-dimensional (2D) micro- and nanostructures by sequential 1D mechanical patterning processes, Nanoscale, 6:24 14636-14642. https://doi.org/10.1039/C4NR05567E
  12. Ok, J. G., Park, H. J., Kwak, M. K., Pina-Hernandez, C. A., Ahn, S. H., Guo, L. J., 2011, Continuous patterning of nanogratings by nanochannel-guided lithography on liquid resists, Adv. Mater., 23:38 4444-4448. https://doi.org/10.1002/adma.201102199

피인용 문헌

  1. 단순직선 모서리형 툴의 수평 이송 기판 상 고주기 진동압입 기반 연속적 나노패턴 생산 시스템 개발 vol.27, pp.3, 2016, https://doi.org/10.7735/ksmte.2018.27.3.182
  2. Tailored Nanopatterning by Controlled Continuous Nanoinscribing with Tunable Shape, Depth, and Dimension vol.13, pp.10, 2016, https://doi.org/10.1021/acsnano.9b04221