Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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A Comparative Study of ITO Glass Ablation Using Femtosecond and Nanosecond Lasers

펨토초 레이저와 나노초 레이저를 이용한 ITO Glass의 어블레이션 비교 연구

  • Jeon, Jin-Woo (Department of Laser & Electron Beam Application, Korea Institute of Machinery & Material (KIMM)) ;
  • Shin, Young-Gwan (Department of Nano-Manufacturing Technology, Korea Institute of Machinery & Material (KIMM)) ;
  • Kim, Hoon-Young (Department of Nano-Manufacturing Technology, Korea Institute of Machinery & Material (KIMM)) ;
  • Choi, Wonsuk (Department of Nano-Manufacturing Technology, Korea Institute of Machinery & Material (KIMM)) ;
  • Ji, Seok-Young (Department of Nano-Manufacturing Technology, Korea Institute of Machinery & Material (KIMM)) ;
  • Kang, Hee-Shin (Department of Laser & Electron Beam Application, Korea Institute of Machinery & Material (KIMM)) ;
  • Ahn, Sanghoon (Department of Laser & Electron Beam Application, Korea Institute of Machinery & Material (KIMM)) ;
  • Chang, Won Seok (Department of Nano-Manufacturing Technology, Korea Institute of Machinery & Material (KIMM)) ;
  • Cho, Sung-Hak (Department of Laser & Electron Beam Application, Korea Institute of Machinery & Material (KIMM))
  • 전진우 (한국기계연구원 광응용기계연구실) ;
  • 신영관 (한국기계연구원 나노공정연구실) ;
  • 김훈영 (한국기계연구원 나노공정연구실) ;
  • 최원석 (한국기계연구원 나노공정연구실) ;
  • 지석영 (한국기계연구원 나노공정연구실) ;
  • 강희신 (한국기계연구원 광응용기계연구실) ;
  • 안상훈 (한국기계연구원 광응용기계연구실) ;
  • 장원석 (한국기계연구원 나노공정연구실) ;
  • 조성학 (한국기계연구원 광응용기계연구실)
  • Received : 2017.06.05
  • Accepted : 2017.10.06
  • Published : 2017.12.25
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Abstract

Indium tin oxide (ITO) provides high electrical conductivity and transparency at visible and near-IR wavelengths. ITO is widely used as a transparent electrode for the fabrication of LCDs, OLEDs, and many kinds of optical applications. It is widely employed for electrodes in various electric and display sectors because of its transparency in the visible range and high conductivity. Therefore, one issue is removing a specific area of a layer of material such as ITO or metallic film on a substrate, without affecting the properties of the substrate. ITO-on-glass removal using a laser is friendlier to the environment than traditional methods. In this study, ablation of ITO film on glass using a femtosecond-laser micromachining system (wavelength 1026 nm, pulse duration 150 fs) and a nanosecond-laser micromachining system (wavelength 1027 nm, pulse duration 5 ns) are described, compared, and analyzed.

ITO는 높은 전기 전도도와 가시광선, 근적외선 영역에서 투명성을 가진다. LCD, OLED 등을 포함한 광학에 적용되는 부품들의 제조에 투명전극으로 ITO가 사용되고 있다. 가시광선 영역에서의 투명성과 높은 전도도 때문에 다양한 전기, 디스플레이 센서의 전극으로 이용되었다. 한 가지 사안은 기판의 특성에 충격없이 ITO, 금속 필름같은 특정한 영역의 층을 제거하는 부분이다. 레이저를 사용한 유리 위의 ITO 제거는 기존 방법에 비해 친환경적이다. 본 연구는 펨토초 레이저와 나노초 레이저를 사용하여 ITO를 제거하는 비교분석이다.

Keywords

References

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