Journal of Magnetics

  • 제22권1호
  • /
  • Pages.49-54
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  • 2017
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  • 1226-1750(pISSN)
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  • 2233-6656(eISSN)
한국자기학회 (The Korean Magnetics Society)
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The Effect of Magnetic Field Direction on the Imaging Quality of Scanning Electron Microscope

  • Ai, Libo (State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) ;
  • Bao, Shengxiang (State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) ;
  • Hu, Yongda (State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) ;
  • Wang, Xueke (State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China) ;
  • Luo, Chuan (State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China)
  • 투고 : 2016.11.30
  • 심사 : 2016.12.19
  • 발행 : 2017.03.31
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초록

The significant reduction of the image quality caused by the magnetic field of samples is a major problem affecting the application of SEM (scanning electron microscopy) in the analysis of electronic devices. The main reason for this is that the electron trajectory is deflected by the Lorentz force. The usual solution to this problem is degaussing the sample at high temperatures. However, due to the poor heat resistance of some electronic components, it is imperative to find a method that can reduce the impact of magnetic field on the image quality and is straightforward and easy to operate without destroying the sample. In this paper, the influence of different magnetic field directions on the imaging quality was discussed by combining the experiment and software simulation. The principle of the method was studied, and the best observation direction was obtained.

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참고문헌

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