Journal of the Korean Society for Heat Treatment (열처리공학회지)

The Korean Society for Heat Treatment (한국열처리공학회)
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Influence of Ag Film Position on the Properties of ZTO/Poly-carbonate Thin Films

Ag 성막위치에 따른 ZTO/폴리카보네이트 필름의 특성 변화

  • 송영환 (울산대학교 첨단소재공학부) ;
  • 엄태영 (울산대학교 첨단소재공학부) ;
  • 천주용 (한국생산기술연구원 울산지역본부) ;
  • 차병철 (한국생산기술연구원 울산지역본부) ;
  • 최동혁 (동국실업주식회사) ;
  • 손동일 (동국실업주식회사) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Received : 2017.04.07
  • Accepted : 2017.04.20
  • Published : 2017.05.30
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Abstract

100 nm thick Sn doped ZnO (ZTO) single layer, 15 nm thick Ag buffered ZTO (ZTO/Ag), Ag intermediated ZTO (ZTO/Ag/ZTO) and Ag capped ZTO (Ag/ZTO) films were prepared on poly-carbonate (PC) substrates by RF and DC magnetron sputtering and then the influence of the Ag thin film on the optical and electrical properties of ZTO films were investigated. As deposited ZTO thin films show the visible transmittance of 81.8%, while ZTO/Ag/ZTO trilayer films show a higher visible transmittance of 82.5% in this study. From the observed results, it can be concluded that the 15 nm thick Ag interlayer enhances the opto-electrical performance of ZTO thin films effectively for use as flexible transparent conducting oxides films in various opto-electrical applications.

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References

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