Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Assembly and Testing of a Visible and Near-infrared Spectrometer with a Shack-Hartmann Wavefront Sensor

샤크-하트만 센서를 이용한 가시광 및 근적외선 분광기 조립 및 평가

  • Received : 2017.01.24
  • Accepted : 2017.03.18
  • Published : 2017.06.25
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Abstract

We report the assembly procedure and performance evaluation of a visible and near-infrared spectrometer in the wavelength region of 400-900 nm, which is later to be combined with fore-optics (a telescope) to form a f/2.5 imaging spectrometer with a field of view of ${\pm}7.68^{\circ}$. The detector at the final image plane is a $640{\times}480$ charge-coupled device with a $24{\mu}m$ pixel size. The spectrometer is in an Offner relay configuration consisting of two concentric, spherical mirrors, the secondary of which is replaced by a convex grating mirror. A double-pass test method with an interferometer is often applied in the assembly process of precision optics, but was excluded from our study due to a large residual wavefront error (WFE) in optical design of 210 nm ($0.35{\lambda}$ at 600 nm) root-mean-square (RMS). This results in a single-path test method with a Shack-Hartmann sensor. The final assembly was tested to have a RMS WFE increase of less than 90 nm over the entire field of view, a keystone of 0.08 pixels, a smile of 1.13 pixels and a spectral resolution of 4.32 nm. During the procedure, we confirmed the validity of using a Shack-Hartmann wavefront sensor to monitor alignment in the assembly of an Offner-like spectrometer.

본 논문은 400~900 nm 파장 대역을 갖는 가시광 및 근적외선 분광기의 조립 및 성능 평가에 대하여 보고한다. 본 분광기는 이 후 결상 망원경과 함께 시야각 ${\pm}7.68^{\circ}$을 갖는 f/2.5의 영상 분광기를 구성한다. 검출기로는 $24{\times}24{\mu}m$ 피치로 이뤄진 $640{\times}480$ 전하결합소자(CCD)가 적용된다. 분광기는 두 개의 동심 구면으로 구성된 오프터 타입이며, 분광을 위하여 2번째 거울이 회절격자 거울로 교체되어 있다. 본 논문에서 다루는 분광기 광학 설계가 제곱평균제곱근(root mean suqared, RMS) 파면 잔여 수차가 210 nm(파장 600 nm 기준, $0.35{\lambda}$)로 통상 적용되는 간섭계를 이용한 이중 경로 광학 측정법 적용이 어렵고, 또한 측정 및 정렬의 용이성을 고려하여 샤크-하트만 센서를 적용한 단일 경로 파면 측정법을 적용하여 정렬 및 조립 절차를 수립하였다. 최종 조립 후 RMS 파면 오차 변화가 전 시야에 걸쳐 90 nm이내로 정렬되었음을 확인하였다. 이 후 조립 광학 구성을 유지한 채 2개 적층슬릿 지그를 이용하여 생성한 다중 핀 홀의 크립톤 램프 분광 이미지를 획득하였으며, 획득된 이미지의 분석을 통하여 조립 분광기의 분광 분해능, 키스톤 및 스마일이 각 4.32 nm, 0.08 픽셀 및 0.13 픽셀로 요구 사항을 만족하는 것을 확인하였다. 결론적으로 샤크-하트만 센서를 적용한 오프너 분광기의 조립 절차는 유효함을 확인하였다.

Keywords

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