Tribology and Lubricants

Korean Tribology Society (한국트라이볼로지학회)
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Study on Frictional Characteristics of Sub-micro Structured Silicon Surfaces

서브 마이크로 구조를 가진 실리콘 표면의 마찰 특성 연구

  • Han, Ji-Hee (Graduate School, Department of Manufacturing Systems and Design Engineering, Seoul National University of Science & Technology) ;
  • Han, Gue-Bum (Graduate School, Dept. of Mechanical Engineering, University of Wisconsin-Madison) ;
  • Jang, Dong-Yong (Manufacturing Systems and Design Engineering Programme, Seoul National University of Science & Technology) ;
  • Ahn, Hyo-Sok (Manufacturing Systems and Design Engineering Programme, Seoul National University of Science & Technology)
  • 한지희 (서울과학기술대학교 대학원 스마트생산융합시스템공학과) ;
  • 한규범 (위스콘신 대학교 대학원 기계공학과) ;
  • 장동영 (서울과학기술대학교 기술경영융합대학 MSDE 전공) ;
  • 안효석 (서울과학기술대학교 기술경영융합대학 MSDE 전공)
  • Received : 2017.03.21
  • Accepted : 2017.05.02
  • Published : 2017.06.30
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Abstract

The understanding of the friction characteristics of micro-textured surface is of great importance to enhance the tribological properties of nano- and micro-devices. We fabricate rectangular patterns with submicron-scale structures on a Si wafer surface with various pitches and heights by using a focused ion beam (FIB). In addition, we fabricate tilted rectangular patterns to identify the influence of the tilt angle ($45^{\circ}$ and $135^{\circ}$) on friction behaviour. We perform the friction test using lateral force microscopy (LFM) employing a colloidal probe. We fabricate the colloidal probe by attaching a $10{\pm}1-{\mu}m$-diameter borosilicate glass sphere to a tipless silicon cantilever by using a ultraviolet cure adhesive. The applied normal loads range between 200 nN and 1100 nN and the sliding speed was set to $12{\mu}m/s$. The test results show that the friction behavior varied depending on the pitch, height, and tilt angle of the microstructure. The friction forces were relatively lower for narrower and deeper pitches. The comparison of friction force between the sub-micro-structured surfaces and the original Si surface indicate an improvement of the friction property at a low load range. The current study provides a better understanding of the influence of pitch, height, and tilt angle of the microstructure on their tribological properties, enabling the design of sub-micro- and micro-structured Si surfaces to improve their mechanical durability.

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References

  1. Borghi, A., Gualtieri, E., Marchetto, D., Moretti, L., and Valeri, S., "Tribological effects of surface texturing on nitriding steel for high-performance engine applications", Wear, Vol. 265, Issues 7, pp. 1046-1051, 2008. https://doi.org/10.1016/j.wear.2008.02.011
  2. Zhuang, Y. X., Menon, A., "On the stiction of MEMS materials", Tribol. Lett., Vol. 19, pp. 111-117, 2005. https://doi.org/10.1007/s11249-005-5088-1
  3. Kim, H. J., Kim, D. E., "Nano-scale friction: A review", Int. J. Precision Eng. Manufacturing, Vol. 10, No. 2, pp.141-151, 2009. https://doi.org/10.1007/s12541-009-0039-7
  4. Bhushan, B. (Ed.), Hanbook of Nanotechnology, Springer, 2004.
  5. Bhushan, B. (Ed.), Hanbook of Micro/Nanotribology (2nd ed.), CRC Press LLC, 1999.
  6. Meng, F., Zhou, R., Davis, T., Cao, J., Wang, Q, J., Hua, D., Liu, J., "Study on effect of dimples on friction of parallel surfaces under different sliding conditions", Applied Surface Sci., Vol. 256, pp. 2863-2875, 2010. https://doi.org/10.1016/j.apsusc.2009.11.041
  7. Choi, W. S., Chae, Y. H., Umehara, N., "Tribological charateristics in $40{\mu}m$ dimple pattern for hexagonal array", J. Korean Soc. Tribol. Lubr. Eng., Vol. 25, No. 1, pp. 25-30, 2009.
  8. Tseng, A. A., "Recent developments in micromilling using focused ion beam technology", J. Micromech. Microeng., Vol. 14, No. 4, pp. 15-34, 2004. https://doi.org/10.1088/0960-1317/14/1/303
  9. Kim, H. B., Noh, S. L., "The characteristics of focused ion beam utilized silicon mold fabrication on the Micro/Nano Scale", J. Korean Soc. Precision Eng., Vol. 28, No. 8, pp. 966-974, 2011.
  10. Han, G. B., Ahn, H. S., "Calibration of effective spring constants of colloidal probes using reference cantilever method", Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 289, No.20, pp. 86-94, 2016.
  11. Park, T. J., Kim, M. G., "Lubrication characteristics of surface textured parallel thrust bearing with ellipsoidal dimples", J. Korean Soc. Tribol. Lubr. Eng., Vol. 32, No. 5, pp. 147-153, 2016. https://doi.org/10.9725/kstle.2016.32.5.147