Current Optics and Photonics

Optical Society of Korea (한국광학회)
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High-speed Three-dimensional Surface Profile Measurement with the HiLo Optical Imaging Technique

  • Kang, Sewon (Graduate School of Mechanical Engineering, Seoul National University) ;
  • Ryu, Inkeon (Department of Mechanical Engineering, Dankook University) ;
  • Kim, Daekeun (Department of Mechanical Engineering, Dankook University) ;
  • Kauh, Sang Ken (Department of Mechanical Engineering, Seoul National University)
  • Received : 2018.09.19
  • Accepted : 2018.10.14
  • Published : 2018.12.25
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Abstract

Various techniques to measure the three-dimensional (3D) surface profile of a 3D micro- or nanostructure have been proposed. However, it is difficult to apply such techniques directly to industrial uses because most of them are relatively slow, unreliable, and expensive. The HiLo optical imaging technique, which was recently introduced in the field of fluorescence imaging, is a promising wide-field imaging technique capable of high-speed imaging with a simple optical configuration. It has not been used in measuring a 3D surface profile although confocal microscopy originally developed for fluorescence imaging has been adapted to the field of 3D optical measurement for a long time. In this paper, to the best of our knowledge, the HiLo optical imaging technique for measuring a 3D surface profile is proposed for the first time. Its optical configuration and algorithm for a precisely detecting surface position are designed, optimized, and implemented. Optical performance for several 3D microscale structures is evaluated, and it is confirmed that the capability of measuring a 3D surface profile with HiLo optical imaging technique is comparable to that with confocal microscopy.

Keywords

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FIG. 1. Diagram of the HiLo optical imaging technique in the Fourier domain: (a) absolute difference value of uniform image and structured image, (b) obtaining the HiLo image by applying a low pass filter (LPF) to D and a high pass filter (HPF) to the uniform image.

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FIG. 2. Experimental setup for the HiLo optical imaging technique. Structured illumination image and uniform illumination image are taken sequentially by moving the grating filter.

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FIG. 3. Illustration of curve fitting to determine the focal plane.

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FIG. 4. Lateral resolution comparison of (a) WFM, (b) HiLo by grid period, and (c) LSCM. FWHM for WFM, HiLo, and LSCM is 0.77 μm, 0.38 μm, and 0.25 μm, respectively. Target: USAF-1951 Positive, group 7 elements 6; objective lens: 50×, NA = 0.95; wavelength of light: WFM & HiLo 440 nm, LSCM 405 nm.

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FIG. 5. Axial intensity profile comparison of HiLo optical imaging technique (black circles and line) and general WFI (yellow triangles and line) using a protected silver mirror. The Stokseth OTF model (dashed line) is also presented as the theoretical value.

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FIG. 6. Variation of axial intensity profile with grid period (left), and measured FWHM for each grid period (right).

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FIG. 7. 3D surface profile and height profile of protected silver mirror, by applying the HiLo optical imaging technique and searching for the brightest point along the z axis. Measured standard deviation of the height profile is 69 nm without curve fitting, and 17 nm with curve fitting.

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FIG. 8. Results of 3D surface profile measurement and height profile of selected sample (a) by (b) LSCM and (c) HiLo; (d) height profiles from both techniques.

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FIG. 9. Results for the tip of stationary knife: (a) surface, (b) WFM image, (c) HiLo image, (d) 3D surface profile measurement, (e) height profile presenting three different angles.

TABLE 1. Grating pattern and illuminated grid period on a sample surface

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