The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지
DOI QR코드

DOI QR Code

ZnO Based All Transparent UV Photodetector with Functional SnO2 Layer

SnO2 기능성 박막을 이용한 ZnO 기반의 투명 UV 광검출기

  • Lee, Gyeong-Nam (Department of Electrical Engineering, Incheon National University) ;
  • Lee, Joo-Hyun (Department of Electrical Engineering, Incheon National University) ;
  • Kim, Joondong (Department of Electrical Engineering, Incheon National University)
  • Received : 2017.06.01
  • Accepted : 2017.11.11
  • Published : 2018.01.01
Download PDF
⟨ Previous Next ⟩

Abstract

All transparent UV photodetector based on ZnO was fabricated with structure of NiO/ZnO/$SnO_2$/ITO by using RF and DC magnetron sputtering system. ZnO was deposited with 4 inch ZnO target (purity 99.99%) for a quality film. In order to build p-n junction up, p-type NiO was formed on n-type ZnO by using reactive sputtering method. The indium tin oxide (ITO) which is transparent conducting oxide (TCO) was applied as a transparent electrode for transporting electrons. To improve the UV photodetector performance, a functional $SnO_2$ layer was selected as an electron transporting and hole blocking layer, which actively controls the carrier movement, between ZnO and ITO. The photodetector (NiO/ZnO/$SnO_2$/ITO) shows transmittance over 50% as similar as the transmittance of a general device (NiO/ZnO/ITO) due to the high transmittance of $SnO_2$ for broad wavelengths. The functional $SnO_2$ layer for band alignment effectively enhances the photo-current to be $15{\mu}A{\cdot}cm^{-2}$ (from $7{\mu}A{\cdot}cm^{-2}$ of without $SnO_2$) with the quick photo-responses of rise time (0.83 ms) and fall time (15.14 ms). We demonstrated the all transparent UV photodetector based on ZnO and suggest the route for effective designs to enhance performance for transparent photoelectric applications.

Keywords

References

  1. H. S. Kim, M. D. Kumar, W. H. Park, M. Patel, and J. Kim, "$Cu4O_3$-based all metal oxides for transparent photodetectors," Sensors Actuators, A Phys., vol. 253, pp. 35-40, 2017. https://doi.org/10.1016/j.sna.2016.11.020
  2. H. S. Kim, J. H. Yun, H. H. Park, M. David Kumar, and J. Kim, "Three-dimensional nanodome-printed transparent conductors for high-performing Si photodetectors," Mater. Lett., vol. 148, pp. 174-177, 2015. https://doi.org/10.1016/j.matlet.2015.02.090
  3. M. Kim, J. Kim, H. Kim, Y. C. Park, K. Ryu, and J. Yi, "Emitter controlled SiNx-free crystalline Si solar cells with a transparent conducting oxide film," Mater. Lett., vol. 79, pp. 284-287, 2012. https://doi.org/10.1016/j.matlet.2012.04.028
  4. T. Ito, H. Yamaguchi, K. Okabe, and T. Masumi, "Singlecrystal growth and characterization of Cu2O and CuO," J. Mater. Sci., vol. 33, pp. 3555-3566, 1998. https://doi.org/10.1023/A:1004690809547
  5. P. Tiwana, P. Docampo, M. B. Johnston, H. J. Snaith, and L. M. Herz, "Electron mobility and injection dynamics in mesoporous ZnO, $SnO_2$, and $TiO_2$ films used in dyesensitized solar cells," ACS Nano, vol. 5, no. 6, pp. 5158-5166, 2011. https://doi.org/10.1021/nn201243y
  6. W. Tian et al., "Low-cost fully transparent ultraviolet photodetectors based on electrospun ZnO-$SnO_2$ heterojunction nanofibers," Adv. Mater., vol. 25, no. 33, pp. 4625-4630, 2013. https://doi.org/10.1002/adma.201301828
  7. T. Zhai, L. Li, X. Wang, X. Fang, Y. Bando, and D. Golberg, "Recent developments in one-dimensional inorganic nanostructures for photodetectors," Adv. Funct. Mater., vol. 20, no. 24, pp. 4233-4248, 2010. https://doi.org/10.1002/adfm.201001259
  8. L. Peng, L. Hu, and X. Fang, "Low-dimensional nanostructure ultraviolet photodetectors," Adv. Mater., vol. 25, no. 37, pp. 5321-5328, 2013. https://doi.org/10.1002/adma.201301802
  9. D. Davazoglou, "Optical properties of $SnO_2$ thin films grown by atmospheric pressure chemical vapour deposition oxiding $SnCl_4$," Thin Solid Films, vol. 302, no. 1-2, pp. 204-213, 1997. https://doi.org/10.1016/S0040-6090(96)09601-0
  10. S. H. Luo et al., "Vacuum electron field emission from $SnO_2$ nanowhiskers synthesized by thermal evaporation," Nanotechnology, vol. 15, no. 11, pp. 1424-1427, 2004. https://doi.org/10.1088/0957-4484/15/11/006
  11. J. Montero, J. Herrero, and C. Guillen, "Preparation of reactively sputtered Sb-doped $SnO_2$ thin films: Structural, electrical and optical properties," Sol. Energy Mater. Sol. Cells, vol. 94, no. 3, pp. 612-616, 2010. https://doi.org/10.1016/j.solmat.2009.12.008
  12. M. Patel, H. S. Kim, and J. Kim, "All Transparent Metal Oxide Ultraviolet Photodetector," Adv. Electron. Mater., vol. 1, no. 11, pp. 1-9, 2015.
  13. J. F. Muth et al., "Absorption coefficient, energy gap, exciton binding energy, and recombination lifetime of GaN obtained from transmission measurements," Appl. Phys. Lett., vol. 71, no. 18, pp. 2572-2574, 1997. https://doi.org/10.1063/1.120191
  14. W.-H. Park and J. Kim, "Transparent and conductive multi-functional window layer for thin-emitter Si solar cells," Mater. Express, vol. 6, no. 5, pp. 451-455, 2016.
  15. D. Y. Kim, J. Ryu, J. Manders, J. Lee, and F. So, "Airstable, solution-processed oxide p-n heterojunction ultraviolet Photodetector," ACS Appl. Mater. Interfaces, vol. 6, no. 3, pp. 1370-1374, 2014. https://doi.org/10.1021/am4050019
  16. A. Klein et al., "Transparent conducting oxides for photovoltaics: Manipulation of fermi level,work function and energy band alignment," Materials (Basel)., vol. 3, no. 11, pp. 4892-4914, 2010. https://doi.org/10.3390/ma3114892
  17. H. Ishii, K. Sugiyama, E. Ito, and K. Seki, "Energy Level Alignment and Interfacial Electronic Structures at Organic/Metal and Organic/Organic Interfaces," Adv. Mater., vol. 11, no. 8, pp. 605-625, 1999. https://doi.org/10.1002/(SICI)1521-4095(199906)11:8<605::AID-ADMA605>3.0.CO;2-Q
  18. W. Salaneck, "The electronic structure of polymermetal interfaces studied by ultraviolet photoelectron spectroscopy," Mater. Sci. Eng. R Reports, vol. 34, no. 3, pp. 121-146, 2001. https://doi.org/10.1016/S0927-796X(01)00036-5
  19. M. Patel et al., "Excitonic metal oxide heterojunction (NiO/ZnO) solar cells for all-transparent module integration," Sol. Energy Mater. Sol. Cells, vol. 170, no. April, pp. 246-253, 2017. https://doi.org/10.1016/j.solmat.2017.06.006