The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on the Control and Estimation of Gap Sensor Offset in High-Precision Magnetic Levitation Transport System

초정밀 자기부상 물류 이송장치의 제어 및 공극 센서 오프셋 추정 연구

  • Kim, Min (Bosch Electrical Drives Co.,Ltd (RBKB)) ;
  • Kim, Chang-Hyun (KIMM(Korea Institute of Machinery and Materials)) ;
  • Ha, Chang-Wan (KIMM(Korea Institute of Machinery and Materials)) ;
  • Won, Mooncheol (Dept. of Mechatronics Engineering, Chungnam National University)
  • Received : 2017.10.16
  • Accepted : 2017.11.19
  • Published : 2018.01.01
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Abstract

The high-precision magnetic levitation transport system is a transport device applying the principle of magnetic levitation. So it is preferable for manufactory process of semiconductor and display industries. In this system, the gap sensors are arranged discontinuously and turned on or off when the tray moves in the running direction. Therefore, precise gap data is important for precise control of the carrier. However, a slight error occurs in the process of installing the gap sensor. So, in this paper, we introduce the high-precision magnetic levitation transport system for OLED evaporation process. Also, we propose a strategy for stable flight control and an offset algorithm for tracking installation errors transport system. The performances of the proposed algorithm are validated through simulation.

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References

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