International journal of advanced smart convergence

The Institute of Internet, Broadcasting and Communication (한국인터넷방송통신학회)
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Simulation of Vacuum Characteristics of High Vacuum System Modelled by VacCAD

  • Kim, Hyungtaek (Department of Advanced Materials Engineering Incheon National University) ;
  • Park, Junhyung (Department of Advanced Materials Engineering Incheon National University) ;
  • Yun, Gyeongah (Department of Advanced Materials Engineering Incheon National University)
  • Received : 2018.10.01
  • Accepted : 2018.10.12
  • Published : 2018.12.31
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Abstract

In this paper, we simulated three different HV systems and analyzed of each vacuum characteristics by VacCAD modelling. In each of modelled vacuum systems, selection of chamber materials, combination of rough pump with high vacuum pump and conductance of roughing line (diameter and length) were proposed as system variables. In the modelling of chamber materials, the pumping times to ultimate pressures of different chamber materials (stainless steel, aluminum) were compared by the variations of chamber volume. In this model, the effects of outgassing dependent on the chamber materials was also simulated and aluminum was estimated to optimum chamber materials. It was also obtained that modelling of vane and roots pump with diffusion pump and diameter, length of $50{\times}250$ [mm]roughing line were characterized as optimum variables to reach the ultimate pressure of 10E-7 [mbar] most effectively. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacCAD simulations. Feasibility of VacCAD as vacuum simulator was verified and applications of VacCAD expected to be increased to fields in vacuum needed.

Keywords

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Figure 1. Main variables panel of VacCAD

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Figure 2. Vacuum chamber panel

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Figure 3. Pumping time of stainless steel and aluminum

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Figure 4. Rough pumping comparison

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Figure 5. Effective high vacuum pumping speed of vane roughing pump

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Figure 6. Pumping time of three different high vacuum pump

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Figure 7. Simulation results of roughing line conductance

Table 1. Proposed simulation modelling

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Table 2. Pumping times of stainless steel and aluminum chamber

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Table 3. Simulation results of roughing line conductance plotted as curves in Fig.5.

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