DOI QR코드

DOI QR Code

Development of High Frequency pMUT Based on Sputtered PZT

  • Lim, Un-Hyun (Dept. of Electrical and Computer Engineering, Ajou University) ;
  • Yoo, Jin-Hee (Dept. of Electrical and Computer Engineering, Ajou University) ;
  • Kondalkar, Vijay (Dept. of Electrical and Computer Engineering, Ajou University) ;
  • Lee, Keekeun (Dept. of Electrical and Computer Engineering, Ajou University)
  • 투고 : 2018.04.12
  • 심사 : 2018.07.09
  • 발행 : 2018.11.01

초록

A new type of piezoelectric micromachined ultrasonic transducer (pMUT) with high resonant frequency was developed by using a thin lead zirconate titanate (PZT) as an insulation layer on a floating $10{\mu}m$ silicon membrane. The PZT insulation layer facilitated acoustic impedance matching at active pMUT, leading to a high performance in the acoustic conversion property compared with the transducer using $SiO_2$ insulation layer. The fabricated ultrasonic devices were wirelessly measured by connecting two identical acoustic transducers to two separate ports in a single network analyzer simultaneously. The acoustic wave emitted from a transducer induced a $3.16{\mu}W$ on the other side of the transducer at a distance of 2 cm. The transducer performances in terms of device diameters, PZT thickness, annealings, and different DC polings, etc. were investigated. COMSOL simulation was also performed to predict the device performances prior to fabrication. Based on the COMSOL simulation, the device was fabricated and the results were compared.

키워드

참고문헌

  1. J. Bernstein, S. Finberg, K. Houston, L. Niles, H. Chen, L. Cross, K. Li, and K. Udayakumar, "Micromachined high frequency ferroelectric sonar transducers," IEEE Trans. Ultrason. Ferroelect. Freq. Contr., vol. 44, pp. 960-969, Sept. 1997. https://doi.org/10.1109/58.655620
  2. I. Wygant, N. Jamal, and H. Lee, "An integrated circuit with transmit beamforming flip-chip bonded to a 2-D CMUT array for 3-D ultrasound imaging," IEEE Trans. Ultrason. Ferroelect. Freq. Contr., vol. 56, pp. 2145-2156, Oct. 2009. https://doi.org/10.1109/TUFFC.2009.1297
  3. B. Khuri-Yakub and O. Oralkan, "Capacitive micromachined ultrasonic transducers for medical imaging and therapy," J. Micromech. Microeng., vol. 21, pp. 054004, Mar. 2011. https://doi.org/10.1088/0960-1317/21/5/054004
  4. A. Hajati, D. Latev, D. Gardner, A. Hajati, D. Imai, M. Torrey, and M. Schoeppler, "Three-dimensional micro electromechanical system piezoelectric ultrasound transducer," Appl. Phys. Lett., vol. 101, pp. 253101, Dec. 2012. https://doi.org/10.1063/1.4772469
  5. Y. Qiu, J. Gigliotti, M. Wallace, F. Griggio, C. Demore, S. Cochran, and S. Trolier-McKinstry, "Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing Actuation and Imaging," Sensors, vol. 15, pp. 8020-8041, Apr. 2015. https://doi.org/10.3390/s150408020
  6. M. Sherar and F. Foster, "The design and fabrication of high frequency transducer," Ultrasonic imaging, vol. 11, pp. 75-94, 1989. https://doi.org/10.1177/016173468901100201
  7. T. Pedersen, T. Zawada, K. Hansen, R. Lou-Moeller, and E. Thomsen, "Fabrication of high-frequency pMUT arrays on silicon substrates," IEEE Trans. Ultrason. Ferroelect. Freq. Contr., vol. 57, pp. 1470-1477, June 2010. https://doi.org/10.1109/TUFFC.2010.1566
  8. P. Kirby, Q. Su, E. Kornuro, Q. Zhang, M. Imura, and R. Whatmore, "PZT thin film bulk acoustic wave resonators and filters," presented at the IEEE Int. Conf. Frequency Control Symposium and PDA Exhibition, 2001, pp. 687.
  9. A. Jakob, M. Bender, T. Knoll, R. Lemor, T. Lehnert, M. Koch, M.Veith, Q. Zhou, B. P. Zhu, J. X. Han, and K. K. Shung, "Comparison of different piezoelectric materials for GHz acoustic microscopy transducers," presented at the IEEE Int. Ultrasonics Symposium, 2009, pp. 1722-1725.
  10. T. Haccart, E. Cattan, and D. Remiens, "Dielectric, ferroelectric and piezoelectric properties of sputtered PZT thin films on Si substrates: influence of film thickness and orientation Semiconductor Physics," Quantum Electronics & Optoelectronics, vol. 5, pp. 78-88, 2002.
  11. L. Gabriel, J. Pulskamp, L. Sanchez, D. Potrepka, R. Proie, T. Ivanov, R. Rudy, W. Nothwang, S. Bedair, C. Meyer, and R. Polcawich, "PZT-Based Piezoelectric MEMS Technology," J. Am. Ceram. Soc., vol. 95, pp. 1777-1792, 2012. https://doi.org/10.1111/j.1551-2916.2012.05155.x
  12. P. Muralt, N. Ledermann, J. Baborowski, A. Barzegar, S. Gentil, B. Belgacem, S. Petitgrand, A. Bosseboeuf, and N. Setter, "Piezoelectric micromachined ultrasonic transducers based on PZT thin films," IEEE Trans. Ultrason. Ferroelect. Freq. Contr., vol. 52, pp. 2276-2288, Dec. 2005. https://doi.org/10.1109/TUFFC.2005.1563270
  13. N. Hanajima, S. Tsutsumi, T. Yonezawa, and K. Hashimoto, "Ultrasonic Properties of Lead Zirconate Titanate Thin films in UHF-SHF Range," Jpn. J. Appl. Phys., vol. 36, pp. 6069-6072, Sept. 1997. https://doi.org/10.1143/JJAP.36.6069
  14. H. Lobl, M. Klee, R. Milsom, R. Dekker, C. Metzmacher, W. Brand, and P. Lok, "Materials for bulk acoustic wave (BAW) resonators and filters," J. Eur. Ceram. Soc., vol. 21, pp. 2633-2640, 2001. https://doi.org/10.1016/S0955-2219(01)00329-6
  15. G. Velu, D. Remiens, and B. Thierry, "Ferroelectric Properties of PZT Thin Films Prepared by Sputtering with Stoichiometric Single Oxide Target: Comparison Between Conventional and Rapid Thermal Annealing," J. Eur. Ceram. Soc., vol. 17, pp. 1749-1755, Feb. 1997. https://doi.org/10.1016/S0955-2219(97)00031-9
  16. P. Muralt, A. Kholkin, M. Kohli, and T. Maeder, "Piezoelectric actuation of PZT thin-film diaphragms at static and resonant Conditions," Sens. Actuators A, vol. 53, pp. 398-404, 1996. https://doi.org/10.1016/0924-4247(96)01139-9
  17. I. Kanno, S. hayashi, T. Kamada, M. Kitagawa, and T. Hirao, "Low Temperature Preparation of Pb(Zr, Ti)$O_3$ Thin Films on (Pb, La)$TiO_3$ Buffer Layer by Multi-Ion-Beam Sputtering," Jpn. J. Appl. Phys., vol. 32, pp. 4057-4060, Sept. 1993. https://doi.org/10.1143/JJAP.32.4057
  18. W. Zhahg, K. Sasaki, and T. Hata, "Low-Temperature Fabrication of Pb(Zr, Ti)$O_3$ Films by RF Reactive Sputtering Using Zr/Ti + PbO Target," Jpn. J. Appl. Phys., vol. 34, pp. 5120-5123, Sept. 1995. https://doi.org/10.1143/JJAP.34.5120
  19. D. Minh, N. Loi, N. Duc, and B. Trinh, "Lowtemperature PZT thin-film ferroelectric memories fabricated on SiO2/Si and glass substrates," Journal of Science: Advanced Materials and Devices, vol. 1, pp. 75-79, Apr. 2016. https://doi.org/10.1016/j.jsamd.2016.03.004
  20. C. Cho, W. Lee, B. Yu, and B. Kim, Journal of Applied Physics, vol. 86, pp. 2700, 1999. https://doi.org/10.1063/1.371114
  21. S. Kim, H. Park, S. Kim, H. Wikle, J. Park, and D. Kim, "Comparison of MEMS PZT Cantilevers Based on d31 and d33 Modes for Vibration Energy Harvesting," J. Micromech. Microeng., vol. 22, pp. 26-33, Feb. 2013.