Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Aluminum Based Oxide/Metal/Oxide Structures for the Application in Transparent Electrodes

알루미늄 기반 Oxide/Metal/Oxide 구조의 투명전극 적용성 기초 연구

  • Kim, Daekyun (School of Advanced Materials Engineering, Dong-Eui University) ;
  • Choi, Dooho (School of Advanced Materials Engineering, Dong-Eui University)
  • 김대균 (동의대학교 신소재공학과) ;
  • 최두호 (동의대학교 신소재공학과)
  • Received : 2018.07.18
  • Accepted : 2018.09.04
  • Published : 2018.11.01
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Abstract

In this study, oxide/metal/oxide-type transparent electrodes based on Al and ZnO were investigated. Thin films of these materials were sputter-deposited at room temperature. To evaluate the thickness dependence of the oxide layers, the top and bottom ZnO layers were varied in the range of 5~80 nm and 2.5~20 nm, respectively. When the thicknesses of the top and bottom ZnO layers were fixed at 30 nm and 2.5 nm, a maximum transmitance of 66% and sheet resistance of $16.5{\Omega}/{\square}$ were achieved, which is significantly improved compared with the Al layer without top and bottom ZnO layers showing a maximum transmitance of 44.3% and sheet resistance of $44{\Omega}/{\square}$.

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References

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