한국수소및신에너지학회논문집 (Transactions of the Korean hydrogen and new energy society)

  • 제29권5호
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  • Pages.434-441
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  • 2018
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  • 1738-7264(pISSN)
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  • 2288-7407(eISSN)
한국수소및신에너지학회 (The Korean Hydrogen and New Energy Society)
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스퍼터링을 통하여 다공성 양극산화 알루미늄 기판에 증착되는 니켈 박막의 기공 크기 조절

Control of the Pore Size of Sputtered Nickel Thin Films Supported on an Anodic Aluminum Oxide Substrate

  • 지상훈 (한국건설기술연구원 국토보전연구본부) ;
  • 장춘만 (한국건설기술연구원 국토보전연구본부) ;
  • 정우철 (한국과학기술원 신소재공학과)
  • JI, SANGHOON (Department of Land, Water and Environment Research, Korea Institute of Civil Engineering and Building Technology (KICT)) ;
  • JANG, CHOON-MAN (Department of Land, Water and Environment Research, Korea Institute of Civil Engineering and Building Technology (KICT)) ;
  • JUNG, WOOCHUL (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST))
  • 투고 : 2018.08.13
  • 심사 : 2018.10.30
  • 발행 : 2018.10.30
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초록

The pore size of nickel (Ni) bottom electrode layer (BEL) for low-temperature solid oxide fuel cells embedded with ultrathin-film electrolyte was controlled by changing the substrate surface morphology and deposition process parameters. For ~150-nm-thick Ni BEL, the upper side of an anodic aluminum oxide (AAO) substrate with ~65-nm-sized pores provided ~1.7 times smaller pore size than the lower side of the AAO substrate. For ~100-nm-thick Ni BEL, the AAO substrate with ~45-nm-sized pores provided ~2.6 times smaller pore size than the AAO substrate with ~95-nm-sized pores, and the deposition pressure of ~4 mTorr provided ~1.3 times smaller pore size than that of ~48 mTorr. On the AAO substrate with ~65-nm-sized pores, the Ni BEL deposited for 400 seconds had ~2 times smaller pore size than the Ni BEL deposited for 100 seconds.

키워드

참고문헌

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