한국결정성장학회지 (Journal of the Korean Crystal Growth and Crystal Technology)

  • 제28권5호
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  • Pages.179-184
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  • 2018
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  • 1225-1429(pISSN)
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  • 2234-5078(eISSN)
한국결정성장학회 (The Korea Association of Crystal Growth)
권호 표지
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쵸크랄스키법 실리콘 성장로에서 핫존 온도분포 경향에 대한 히터와 석영도가니의 상대적 위치의 영향

Influence of relative distance between heater and quartz crucible on temperature profile of hot-zone in Czochralski silicon crystal growth

  • 김광훈 (웅진에너지연구소) ;
  • 권세진 (웅진에너지연구소) ;
  • 김일환 (한양대학교 전자컴퓨터통신공학과) ;
  • 박준성 (한양대학교 전자컴퓨터통신공학과) ;
  • 심태헌 (한양대학교 전자컴퓨터통신공학과) ;
  • 박재근 (한양대학교 전자컴퓨터통신공학과)
  • Kim, Kwanghun (R&D Center, WoongjinEnergy) ;
  • Kwon, Sejin (R&D Center, WoongjinEnergy) ;
  • Kim, Ilhwan (Department of Electronic and Computer Engineering, Hanyang University) ;
  • Park, Junseong (Department of Electronic and Computer Engineering, Hanyang University) ;
  • Shim, Taehun (Department of Electronic and Computer Engineering, Hanyang University) ;
  • Park, Jeagun (Department of Electronic and Computer Engineering, Hanyang University)
  • 투고 : 2018.09.20
  • 심사 : 2018.10.12
  • 발행 : 2018.10.31
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초록

고효율 태양전지용 단결정 실리콘 웨이퍼는 쵸크랄스키 성장법으로 석영도가니 속의 실리콘 액체에서 단결정 잉곳을 성장시켜 제조된다. 석영도가니 성분 중의 하나는 산소는 실리콘 잉곳으로 유입되고, 태양전지의 전력변환 효율 저하 문제를 발생시킨다. 이러한 산소 유입을 줄이는 다양한 방법 중 하나는 히터의 모양과 구조를 변경하는 방법이 있다. 그러나 히터 구조 변경 시 단결정 실리콘 잉곳 바디 성장에 필요한 온도 분포경향에 큰 변화를 일으킨다. 따라서 본 연구에서는 쵸크랄스키 실리콘 성장에서 다양한 히터의 구조와, 히터와 석영도가니의 상대적 위치가 단결정 실리콘 잉곳 Body 성장 시의 ATC 온도와 Power 분포경향에 미치는 영향에 대하여 연구하였다. 삼중점과 히터 중심과의 위치가 가장 먼 SSH-Low가 가장 높은 ATC 온도 분포경향을 보여주었다. 또한 길이가 짧은 Short Side Heater(SSH-Up, SSH-Low)보다는 실리콘 액체를 담고 있는 석영도가니 측면의 많은 영역을 커버할 수 있는 일반 Side Heater(SH)가 가장 Power 소모 측면에서 유리하였다. 특히 본 연구 결과를 통해 고효율 태양전지용 단결정 실리콘 잉곳 성장 시 필요한 효율적인 ATC 온도를 예측할 수 있음을 확인하였다.

To lessen oxygen concentrations in a wafer through modifying the length of graphite heaters, we investigated the influence of relative distance from heater to quartz crucible on temperature profile of hot-zone in Czochralski silicon-crystal growth by simulation. In particular, ATC temperature and power profiles as a function of different ingot body positions were investigated for five different heater designs; (a) typical side heater (SH), (b) short side heater-up (SSH-up), (c) short side heater-low (SSH-low), (d) bottom heater without side heater (Only-BH), and (e) side heater with bottom heater (SH + BH). It was confirmed that lower short side heater exhibited the highest ATC temperature, which was attributed to the longest distance from triple point to heater center. In addition, for the viewpoint of energy efficiency, it was observed that the typical side heater showed the lowest power because it heated more area of quartz crucible than that of others. This result provides the possibility to predict the feed-forward delta temperature profile as a function of various heater designs.

키워드

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