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Frequency Response Estimation of 1.3 ㎛ Waveguide Integrated Vertical PIN Type Ge-on-Si Photodetector Based on the Analysis of Fringing Field in Intrinsic Region

  • Seo, Dongjun (School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST)) ;
  • Kwon, Won-Bae (Honam Research Center, Electronics and Telecommunications Research Institute (ETRI)) ;
  • Kim, Sung Chang (Honam Research Center, Electronics and Telecommunications Research Institute (ETRI)) ;
  • Park, Chang-Soo (School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST))
  • Received : 2019.10.14
  • Accepted : 2019.10.22
  • Published : 2019.12.25

Abstract

In this paper, we introduce a 1.3-㎛ 25-GHz waveguide-integrated vertical PIN type Ge-on-Si photodetector fabricated using a multi-project wafers service based on fringing field analysis in the depletion region. In general, 1.3-㎛ photodetectors fabricated using a commercial foundry service can achieve limited bandwidths because a significant amount of photo-generated carriers are located within a few microns from the input along the device length, and they are influenced by the fringing field, leading to a longer transit time. To estimate the response time, we calculate the fringing field in that region and the transit time using the drift velocity caused by the field. Finally, we compare the estimated value with the measured one. The photodetector fabricated has a bandwidth of 20.75 GHz at -1 V with an estimation error of <3 GHz and dark current and responsivity of 110 nA and 0.704 A/W, respectively.

Keywords

References

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