Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Characteristics of a Titanium-oxide Layer Prepared by Plasma Electrolytic Oxidation for Hydrogen-ion Sensing

  • Lee, Do Kyung (Department of Advanced Material Science and Chemical Engineering, Daegu Catholic University) ;
  • Hwang, Deok Rok (Department of Advanced Material Science and Chemical Engineering, Daegu Catholic University) ;
  • Sohn, Young-Soo (Department of Biomedical Engineering, Daegu Catholic University)
  • Received : 2019.03.19
  • Accepted : 2019.03.26
  • Published : 2019.03.31
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Abstract

The characteristics of a titanium oxide layer prepared using a plasma electrolytic oxidation (PEO) process were investigated, using an extended gate ion sensitive field effect transistor (EG-ISFET) to confirm the layer's capability to react with hydrogen ions. The surface morphology and element distribution of the PEO-processed titanium oxide were observed and analyzed using field-emission scanning-electron microscopy (FE-SEM) and energy-distribution spectroscopy (EDS). The titanium oxide prepared by the PEO process was utilized as a hydrogen-ion sensing membrane and an extended gate insulator. A commercially available n-channel enhancement MOS-FET (metal-oxide-semiconductor FET) played a role as a transducer. The responses of the PEO-processed titanium oxide to different pH solutions were analyzed. The output drain current was linearly related to the pH solutions in the range of pH 4 to pH 12. It was confirmed that the titanium-oxide layer prepared by the PEO process could feasibly be used as a hydrogen-ion-sensing membrane for EGFET measurements.

Keywords

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Fig. 3. Cross section of the SEM image of the specimen.

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Fig. 4. EDS spectrum of the PEO coating.

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Fig. 5. Id-Vd graphs of (a) the commercial n-MOSFET(2N7008) and (b) the EGFET with different pH values.

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Fig. 1. (a) Schematic diagram of electrical measurement setup; (b) reference electrode, specimens, and corrosion-test cell.

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Fig. 2. FE-SEM micrograph of the surface of the PEO coating. (a) 1k magnified image; (b) 30k magnified image.

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Fig. 6. (a) pH versus Id in the saturated region; (b) linear regression of the relation between Id and pH from 4 to 12.

Table 1. Electrolyte composition

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Table 2. EDS analysis of the PEO layer.

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