그림 1. DC 파워에 따른 ITO 박막의 비저항과 면저항 Fig. 1 Resistivity and sheet resistance of the ITO thin films with various DC power
그림 2. DC 파워에 따른 ITO 박막의 AFM 표면 형상 Fig. 2 The AFM images of the ITO thin films with various DC power
그림 3. DC 파워에 따른 ITO 박막의 투과도 Fig. 3 Transmittance of the ITO thin films with various DC power
그림 4. DC 파워에 따른 ITO 박막의 파장 550 nm와 400-800 nm의 파장 범위에서의 투과도와 재료평가지수 Fig. 4 Transmittance and figure of merit of the ITO thin films with various DC power in wavelength ranges of 400-800 nm and for 550 nm wavelength
그림 5. DC 파워에 따른 ITO 박막의 색도(b*) Fig. 5 Chromaticity(b*) of the ITO thin films with various DC power
표 1. Nb2O5 와 SiO2 박막의 증착조건 Table 1. Deposition conditions for the Nb2O5 and SiO2 thin films
표 2. ITO 박막의 증착조건 Table 2. Deposition conditions for the ITO thin films
참고문헌
- G. Barret and R. Omote, "Projected-capacitive touch technology," Information Display, vol. 26, no. 3, Mar. 2010, pp. 16-21.
- X. Zhou, J. Xu, L. Yang, G. Zhu, and Z. Yu, "Effects of Tin Content on Structure, Properties Electrical Repeatability, Uniformity and Stability of High Sheet Resistance ITO Thin Films for Touch Panels," J. Materials Science : Materials in Electronics, vol. 26, issue 9, June 2015, pp. 6954-6960. https://doi.org/10.1007/s10854-015-3314-7
- Y. Kim and A. Tewfik, "Low Power Detection on Capacitive Touch Screens", 2013 IEEE Global Conference on Signal and Information Processing, Austin, TX, USA, Dec. 2013, pp. 638-641.
- R. Aguilar and G. Meijer, "Fast Interface Electronics for a Resistive Touch Screen," In Proc. IEEE Sensors, vol. 2, June 2002, pp. 1360-1363.
- T. Hwang, W. Cui, I. Yang, and O. Kwon, "A Highly Area-Efficient Controller for Capacitive Touch Screen Panel Systems," IEEE Trans. Consumer Electron., vol. 56, issue 2, May 2010, pp. 1115-1122. https://doi.org/10.1109/TCE.2010.5506047
- S. Hotelling and B. Land, "Double-Sided Touch- Sensitive Panel with Shield and Drive Combined Layer," United States Patent, no. 11650182, July 3, 2008.
- C. Hong, J. Shin, B. Ju, K. Kim, N. Park, B. Kim, and W. S. Cheong, "Index-Matched Indium Tin Oxide Electrodes for Capacitive Touch Screen Panel Applications," J. Nanosci. Nanotechnol., vol. 13, no. 11, Nov. 2013, pp. 7756-7759. https://doi.org/10.1166/jnn.2013.7814
- C. Kim, W. Choi, S. K. Cho, G. Daiji, D. Ham, K. Kim, J. Jeong, J. Lee, and S. Lee, "Fabrication of Structurally Simple Index-Matched ITO Films Using Roll-to-Roll Sputtering for Touch Screen Panel Devices," Plasma Processes & Polymers, vol. 12, issue 11, Nov. 2015, pp. 1322-1327. https://doi.org/10.1002/ppap.201500057
-
M. Park, B. Kang, J. Kim, H. Kim, H. S. Kim, W. Lim, and S. Choi, "Chromaticity (b*), Sheet Resistance and Transmittance of
$SiO_2$ -ITO Thin Films Deposited on PET Film by Using Roll-to-Roll Sputter System," Korean J. Materials Research vol. 21, no. 5, May 2011, pp. 255-262. https://doi.org/10.3740/MRSK.2011.21.5.255 - S. Kim, S. Cho, S. Choi, H. Yoon, and P. Song, "Properties of ITO Films Deposited by RF Superimposed DC Magnetron Sputtering," Current Applied Physics, vol. 9, issue 3, Mar. 2009, pp. S262-S265. https://doi.org/10.1016/j.cap.2009.01.031
- G. Haacke, "New Figure of merit for Transparent Conductors," J. Applied Physics, vol. 47, issue 9, Oct. 1976, pp. 4086-4089. https://doi.org/10.1063/1.323240