Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Microstructural Control of Pyrolytic Carbon Layer Deposited from Methane by Isotropic Chemical Vapor Infiltration

  • Jeong, Young-Seok (Icheon Branch, Korea Institute of Ceramic Engineering and Technology) ;
  • Choi, Kyoon (Icheon Branch, Korea Institute of Ceramic Engineering and Technology) ;
  • Yoo, Ho Gyu (Department of Materials Science and Engineering, Korea University)
  • Received : 2019.04.19
  • Accepted : 2019.05.09
  • Published : 2019.05.31
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Abstract

Pyrolytic carbon (PyC) layers were deposited using methane. The PyC layer deposited with 5% methane showed highly textured graphite, while that deposited using 100% methane showed low textured graphite. The degrees of anisotropy of the carbon layers were measured using an X-ray diffractometer, a transmission electron microscope, and a Raman spectroscope, and the results were compared with those reported previously. The orientation angles obtained from the fast Fourier transformation of the high-resolution transmission electron microscopy images and the ID/IG intensity ratios obtained from the Raman spectra were used to evaluate the anisotropy of the PyC layers.

Keywords

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