마이크로전자및패키징학회지 (Journal of the Microelectronics and Packaging Society)

  • 제27권2호
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  • Pages.11-17
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  • 2020
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  • 1226-9360(pISSN)
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  • 2287-7525(eISSN)
한국마이크로전자및패키징학회 (The Korean Microelectronics and Packaging Society)
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NO2 감응을 위한 Ag 금속입자가 기능화된 SnO2 나노선 기반 저온동작 센서

Ag-functionalized SnO2 Nanowires Based Sensor for NO2 Detection at Low Operating Temperature

  • 최명식 (연세대학교 신소재공학과) ;
  • 김민영 (연세대학교 신소재공학과) ;
  • 안지혜 (연세대학교 신소재공학과) ;
  • 최승준 (연세대학교 신소재공학과) ;
  • 이규형 (연세대학교 신소재공학과)
  • Choi, Myung Sik (Department of Materials Science and Engineering, Yonsei University) ;
  • Kim, Min Young (Department of Materials Science and Engineering, Yonsei University) ;
  • Ahn, Jihye (Department of Materials Science and Engineering, Yonsei University) ;
  • Choi, Seung Joon (Department of Materials Science and Engineering, Yonsei University) ;
  • Lee, Kyu Hyoung (Department of Materials Science and Engineering, Yonsei University)
  • 투고 : 2020.05.15
  • 심사 : 2020.06.19
  • 발행 : 2020.06.30
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초록

본 연구에서는 Ag 금속입자가 기능화된 SnO2 나노선을 제작 및 저온 NO2 가스 센싱 특성을 평가하였다. Vapor-liquid-solid 공법을 이용하여 SnO2 나노선을 합성하였고, flame chemical vapour deposition 공법을 이용하여 Ag 금속입자를 SnO2 나노선 표면에 기능화하였다. 합성된 Ag 금속입자가 기능화된 SnO2 나노선을 이용하여 50℃에서 NO2 10 ppm에 대한 가스 센싱 테스트를 진행한 결과, 감응도(Rg/Ra) 1.252를 얻었다. 본 연구를 통하여, 금속입자가 기능화된 나노선을 이용한 저온동작 반도체식 가스센서의 산업 적용을 현실화 할 수 있을 것으로 기대된다.

In this study, Ag-functionalized SnO2 nanowires are presented for NO2 gas sensitive sensors at low temperatures (50℃). SnO2 nanowires were synthesized using vapor-liquid-solid method, and Ag metal particles were functionalized on the surface of SnO2 nanowires using flame chemical vapor deposition method. As a result of the sensing test about Ag-functionalized SnO2 nanowires based sensor, the response (Rg/Ra) to 10 ppm NO2 was 1.252 at 50℃. We believe that metal-functionalizing is a one of good way to increase the feasibility about semiconductor gas sensor.

키워드

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