Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Synthesis of TiN-Coated cBN Powder by Sol-Gel Method Using Titanium (IV) Isopropoxide

티타늄 이소프로폭사이드를 이용한 졸-겔법에 의한 TiN 코팅 cBN 분말 합성

  • Lee, Youn Seong (Optic & Electronic Component Materials Center, Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Sun Woog (Optic & Electronic Component Materials Center, Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Young Jin (Optic & Electronic Component Materials Center, Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Ji Sun (Optic & Electronic Component Materials Center, Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering and Technology) ;
  • Shin, Dongwook (Division of Materials Science and Engineering, Hanyang University) ;
  • Kim, Sae-Hoon (Department of Ceramic Engineering, Gangneung Wonju National University) ;
  • Kim, Jin Ho (Optic & Electronic Component Materials Center, Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering and Technology)
  • 이윤성 (한국세라믹기술원 전자융합본부 광전자부품소재팀) ;
  • 김선욱 (한국세라믹기술원 전자융합본부 광전자부품소재팀) ;
  • 이영진 (한국세라믹기술원 전자융합본부 광전자부품소재팀) ;
  • 이지선 (한국세라믹기술원 전자융합본부 광전자부품소재팀) ;
  • 신동욱 (한양대학교 대학원 신소재공학부) ;
  • 김세훈 (강릉원주대학교 세라믹신소재공학과) ;
  • 김진호 (한국세라믹기술원 전자융합본부 광전자부품소재팀)
  • Received : 2020.06.12
  • Accepted : 2020.07.13
  • Published : 2020.09.01
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Abstract

In this study, TiN-coated cBN (cubic-structure boron nitride) powders were successfully synthesized by a sol-gel method using titanium (IV) isopropoxide (TTIP) and by controlling the heat treatment conditions. After the sol-gel process, amorphous nano-sized TiOx was uniformly coated on the surface of cBN powder particles. The obtained TiOx-coated cBN powders were heated at 1,000~1,300℃ for 1 or 6 h in a flow of 95%N2-5%H2 mixed gas. With increasing temperature, the chemical composition of the TiOx coating layer changed in the order of TiO2→Ti6O11→Ti4O7→TiN due to reduction of the Ti ions. The TiN coating layer was observable in the samples heated at 1,200℃ and appeared as the main phase in the sample heated at 1,300℃. The resulting thickness of the TiN coating layer of the sample heated at 1,300℃ was approximately 45~50 nm.

Keywords

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