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Research on BTU and Short-axis Geometry of Line-beam Optics for LLO Applications

레이저 박리용 선형 빔 광학계의 빔 변환 모듈과 단축 형상에 대한 연구

  • Received : 2021.11.02
  • Accepted : 2021.11.17
  • Published : 2021.12.25

Abstract

This paper reports the study of the line-beam optical system of the laser lift-off (LLO) equipment used in the OLED manufacturing process. To obtain both a long process depth and a narrow width of the line beam, even with the poor M2 value of the laser source, the research is focused on the optical system, including the beam transformation unit (BTU). We also propose optical configurations for the super-Gaussian distribution and the fiber-based BTU for the flat-top distribution.

본 논문은 디스플레이용 OLED의 제작 공정에 사용하는 레이저 박리(laser lift-off, LLO) 장비의 선형빔 광학계에 대한 연구로서, M2가 큰 레이저를 사용하는 경우, 단축의 선폭을 작게 만들면서 공정심도를 깊게 유지하기 위한 빔 변환 모듈(beam transformation unit, BTU)을 포함한 광학계에 대한 연구를 진행하였고, 단축 형상을 슈퍼 가우시안으로 만들 수 있는 방법과 flat-top 분포로 만들 수 있는 광섬유를 사용하는 빔 변환 방식에 대하여 제시하였다.

Keywords

Acknowledgement

이 연구는 2019년도 산업통상자원부 및 산업기술평가관리원(KEIT) 연구비 지원에 의한 연구임('과제번호20006533').

References

  1. F. M. Dickey, Laser Beam Shaping, 2nd ed. (CRC Press, FL, USA, 2014), Chapter 1.
  2. F. M. Dickey, S. C. Holswade, and D. L. Shealy, Laser Beam Shaping Applications, 1st ed. (CRC Press, FL, USA, 2006), Chapter 2-3.
  3. B. Y. Kim, J. H. Kim, J. A. Byeon, J. H. Lee, J. H. Seo, and J. M. Lee, "Design and analysis of a laser lift-off system using an excimer laser," Korean J. Opt. Photon. 24, 224-230 (2013). https://doi.org/10.3807/KJOP.2013.24.5.224
  4. Y. H. Han, "Laser beam quality and process efficiency," Laser Solutions 22, 4-9 (2019).
  5. I. Mikliaev, V. Lissotschenko, A. Mikhailov, and M. Darsht, "Device for beam shaping," Korean Patent 10-095137 (2010).
  6. S. Yamaguchi, M. Daimon, K. Chiba, T. Kobayashi, and Y. Saito, "Optical path rotating device used with linear array laser diode and laser apparatus applied therewith," U.S. Patent US5513201A (1996).
  7. I. Mikliaev, "Device for beam shaping," Korean Patent 10-1547714 (2015).
  8. M. Huonker, C. Tillkorn, and S. Dorer, "Laser line illumination," Korean Patent 10-2019-0034589 (2019).
  9. J. Y. Chu, M. H. Seo, J. C. Lee, and W. D. Joo, "Optical rearrangement device, system including the same and method of providing the same," Korean Patent 10-2020-0033387 (2020).
  10. J.-H. Jung, "Line beam forming apparatus," Korean Patent 10-2283288 (2021).
  11. J.-H. Jung, "Line beam forming apparatus," Korean Patent 10-2020-0016892 (2020).
  12. H. Muenz, A. Herkommer, and R. Egger, "Optical illumination system for creating a line beam," Korean Patent 10-2007-0090246 (2007).
  13. J.-H. Jung, "Line beam forming apparatus," Korean Patent 10- 2020-0087170 (2020).