Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Fabrication of Solution-Based Cylindrical Microlens with High Aspect Ratio

고종횡비를 갖는 용액기반 원통형 마이크로렌즈 제조

  • Jeon, Kyungjun (School of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) ;
  • Lee, Jinyoung (Interdisciplinary Program in Creative Engineering, Korea University of Technology and Education) ;
  • Park, Jongwoon (School of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education)
  • 전경준 (한국기술교육대학교 전기.전자.통신공학부) ;
  • 이진영 (한국기술교육대학교 창의융합공학협동과정) ;
  • 박종운 (한국기술교육대학교 전기.전자.통신공학부)
  • Received : 2021.03.09
  • Accepted : 2021.03.15
  • Published : 2021.03.31
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Abstract

A cylindrical microlens (CML) has been widely used as an optical element for organic light-emitting diodes (OLEDs), light diffusers, image sensors, 3D imaging, etc. To fabricate high-performance optoelectronic devices, the CML with high aspect ratio is demanded. In this work, we report on facile solution-based processes (i.e., slot-die and needle coatings) to fabricate the CML using poly(methyl methacrylate) (PMMA). It is found that compared with needle coating, slot-die coating provides the CML with lower aspect ratio due to the wide spread of solution along the hydrophilic head lip. Although needle coating provides the CML with high aspect ratio, it requires a high precision needle array module. To demonstrate that the aspect ratio of CML can be enhanced using slot-die coating, we have varied the molecular weight of PMMA. We can achieve the CML with higher aspect ratio using PMMA with lower molecular weight at a fixed viscosity because of the higher concentration of PMMA solute in the solution. We have also shown that the aspect ratio of CML can be further boosted by coating it repeatedly. With this scheme, we have fabricated the CML with the width of 252 ㎛ and the thickness of 5.95 ㎛ (aspect ratio=0.024). To visualize its light diffusion property, we have irradiated a laser beam to the CML and observed that the laser beam spreads widely in the vertical direction of the CML.

Keywords

References

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