The Journal of the Korea institute of electronic communication sciences (한국전자통신학회논문지)

Korea Institute of Electronic Communication Science (한국전자통신학회)
권호 표지
DOI QR코드

DOI QR Code

Influence of the RF Power on the Optical and Electrical Properties of ITZO Thin Films Deposited on SiO2/PES Substrate

RF파워가 SiO2/PES 기판위에 증착한 ITZO 박막의 광학적 및 전기적 특성에 미치는 효과

  • 최병균 (전남대학교 전기 및 반도체공학과) ;
  • 정양희 (전남대학교 전기 및 반도체공학과) ;
  • 강성준 (전남대학교 전기 및 반도체공학과)
  • Received : 2021.03.15
  • Accepted : 2021.06.17
  • Published : 2021.06.30
Download PDF
⟨ Previous Next ⟩

Abstract

After selecting a PES substrate with excellent thermal stability and optical properties among plastic substrates, a SiO2 thin film was deposited as a buffer layer to a thickness of 20nm by plasma-enhanced chemical vapor deposition to compensate for the high moisture absorption. Then, the ITZO thin film was deposited by a RF magnetron sputtering method to investigate electrical and optical properties according to RF power. The ITZO thin film deposited at 50W showed the best electrical properties such as a resistivity of 8.02×10-4 Ω-cm and a sheet resistance of 50.13Ω/sq.. The average transmittance of the ITZO thin film in the visible light region(400-800nm) was relatively high as 80% or more when the RF power was 40 and 50W. Figure of Merits (ΦTC and FOM) showed the largest values of 23.90×10-4 Ω-1 and 5883 Ω-1cm-1, respectively, in the ITZO thin film deposited at 50W.

플라스틱 기판 중에서 열적 안정성과 광학적 특성이 우수한 PES 기판을 선택한 후, 흡습성이 높은 단점을 보완하기 위해 플라즈마 화학기상증착 법으로 SiO2 박막을 버퍼층으로 20nm 두께로 증착하였다. 그 후 ITZO 박막을 고주파 마그네트론 스퍼터링 법으로 증착하여 RF파워에 따른 전기적 및 광학적 특성들을 조사하였다. RF파워 50W에서 증착한 ITZO 박막이 8.02 × 10-4 Ω-cm의 비저항과 50.13 Ω/sq.의 면저항으로 가장 우수한 전기적 특성을 나타내었다. ITZO 박막의 가시광 영역(400-800 nm)에서의 평균 투과도는 RF파워가 40, 50W인 경우 80% 이상으로 비교적 높은 값을 나타내었다. 재료 평가 지수들인 ΦTC와 FOM은 RF파워 50W에서 증착한 ITZO 박막에서 각각 23.90×10-4 Ω-1와 5883 Ω-1cm-1로 가장 큰 값을 나타내었다.

Keywords

References

  1. H. Jang, J. Lee, J. Kwak, D. Lee, J. Park, B. Lee, and Y. Noh, "Progress of display performances : AR, VR, QLED, OLED, and TFT," J. INF. DISP., vol. 20, no. 1, Feb. 2019, pp. 1-8. https://doi.org/10.1080/15980316.2019.1572662
  2. A. Phadke, "An Overview of Current Display Technologies and Possible Future Technologies," 2019 IEEE International Conference on Electrical, Computer and Communication Technologies (ICECCT), Coimbatore, India, Feb. 2019, pp. 1-6.
  3. Y. Fujisaki, M. Nakata, Y Nakajima, H. Tsuji, M. Miyakawa, G. Motomura, H. Fukagawa, T. Shimizu, T. Tsuzuki, T. Takei, and T. Yamamoto, "Oxide/Organic Semiconductor Electro -nics on Plastic Substrates for Flexible AMOLED Displays," SID Symposium Digest of Technical Papers, vol. 47, issue 1, May 2016, pp. 633-636.
  4. M. Chung, S. Kim, D. Yoo, and J. Kim, "Materials and Characteristics of Emerging Transparent Electrodes," Appl. Chem. Eng., vol. 25, no. 3, Apr. 2014, pp. 242-248. https://doi.org/10.14478/ace.2014.1013
  5. T. Takatoshi, H. Takeshi, N. Tomoyuki, I. Hiroshi, K. Toshiyuki, F. Shun, and Y. Kazuhiro, "Development of a Vertically-stacked Color-tunable Polychromatic Organic-light-emitting-diode Device for Roll-to-roll Manufacturing," SID Symposium Digest of Technical Papers, vol. 47, issue 1, May 2016, pp. 42-45.
  6. H. Zhuang, J. Yan, C. Xu, and D. Meng, "Transparent Conductive Ga2O3/Cu/ITO Multilayer Films Prepared on Flexible Substrates at Room Temperature," Applied Surface Science, vol. 307, no. 15, Apr. 2014, pp. 241-245. https://doi.org/10.1016/j.apsusc.2014.04.020
  7. B. Houng, S. L. Lin, S. W. Chen, and A. Wang, "Influence of An In2O3 Buffer Layer on The Properties of ITO Thin Films," Ceramics International, vol. 37, issue 8, Dec. 2011, pp. 3397-3403. https://doi.org/10.1016/j.ceramint.2011.05.142
  8. J. Park, Y. Joung, and S. Kang, "Electrical and Optical Properties of the IZTO Thin Film Deposited on PET Substrates with SiO2 Buffer Layer," J. Korea Inst. Inf. Commun. Eng., vol. 21, no. 3, Mar. 2017, pp. 578-584. https://doi.org/10.6109/jkiice.2017.21.3.578
  9. Y. Joung, B. Choi, and S. Kang, "Effect of Working Pressure on the Electrical and Optical Properties of ITZO Thin Films Deposited on PES Substrate with SiO2 Buffer Layer," J. of the Korea Institute of Electronic Communication Sciences, vol. 14, no. 5, Oct. 2019, pp. 887-892.
  10. S. Hong, "Polymeric Substrate Materials for Flexible Displays," Polymer Science and Technology, vol. 28, no. 6, Dec. 2017, pp. 470-475.
  11. U. Betz, M. K. Olsson, J. Marthy, M. F. Escola, and F. Atamny, "Thin Films Engineering of Indium Tin Oxide : Large Area Flat Panel Displays Application," Surf. Coat. Technol., vol. 200, issues 20-21, May 2006, pp. 5751-5759. https://doi.org/10.1016/j.surfcoat.2005.08.144
  12. J. Kim, K. Jeon, G. Kim, and S. Lee, "Electrical, Structural, and Optical Properties of ITO Thin Films Prepared at Room Temperature by Pulsed Laser Deposition," Apple. Surf. Sci., vol. 252, issue 13, Apr. 2006, pp. 4834-4837. https://doi.org/10.1016/j.apsusc.2005.07.134
  13. D. Son, Y. Ko, D. Jung, J. Boo, S. Choa, and Y. Kim, "Thermal Effect on Characteristics of IZTO Thin Films Deposited by Pulsed DC Magnetron Sputtering," Bull. Korean Chem. Soc., vol. 32, issue 3, Mar. 2011, pp. 847-851. https://doi.org/10.5012/bkcs.2011.32.3.847
  14. J. Bae, J. Moon, S. Jeong, J. Kim, J. Kang, D. Kim, J. Kim, J. Park, and H. Kim, "Transparent Conducting Indium Zinc Tin Oxide Anode for Highly Efficient Phosphorescent Organic Light Emitting Diodes," J. Electrochem. Soc., vol. 155, issue 1, Jan. 2008, pp. J1-J6. https://doi.org/10.1149/1.2799745
  15. H. C. Pan, M. H. Shuao, C. Y. Su, and C. N. Hsiao, "Influence of Sputtering Parameter on the Optical and Electrical Properties of Zinc-doped Indium Oxide Thin Films," J. Vac. Sci. Technol. A, vol. 23, no. 4, June 2005, pp. 1187-1191. https://doi.org/10.1116/1.1924473
  16. G. Haacke, "New Figure of Merit for Transparent Conductors," J. Appl. Phys., vol. 47, issue 9, Aug. 1976, pp. 4086-4089. https://doi.org/10.1063/1.323240
  17. S. Fernandez, A. Martinez-Steele, J. J. Gandia, and F. B. Naranjo, "Radio frequency sputter deposition of high-quality conductive and transparent ZnO : Al films on polymer substrates for thin film solar cells applications," Thin Solid Films, vol. 517, issue 10, Mar. 2009, pp. 3152-3156. https://doi.org/10.1016/j.tsf.2008.11.097
  18. N. Hu, H. Cai, X. Dai, G. Chen, Y. Wang, and D. Zhang, "Figure of merit for front electrodes of solar cells," Sol. Energy Mater. Sol. Cells, vol. 161, Mar. 2017, pp. 382-387. https://doi.org/10.1016/j.solmat.2016.12.014