Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Study on Thermal Properties and Plasma Resistance of MgO-Al2O3-SiO2 Glass

MgO-Al2O3-SiO2계 유리의 열물성과 내플라즈마성 연구

  • Yoon, Ji Sob (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Choi, Jae Ho (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Jung, YoonSung (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Min, Kyung Won (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Im, Won Bin (Division of Materials Science and Engineering, Hanyang University) ;
  • Kim, Hyeong-Jun (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology)
  • Received : 2021.05.15
  • Accepted : 2021.06.18
  • Published : 2021.06.30
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Abstract

In this study, we studied the alternative of plasma resistant ceramic parts that constitute plasma chambers in the semiconductor dry etching process. MgO-Al2O3-SiO2(MAS) glass was made of 13 types of glass using the Design Of Experiments(DOE) and the effect on thermal properties such as glass transition temperature and crystallization temperature depending on the content of each composition and etching resistance to CF4/O2/Ar plasma gas. MAS glass showed excellent plasma resistance and surface roughness up to 20 times higher than quartz glass. As the content of Al2O3 and MgO increases, the plasma resistance is improved, and it has been confirmed that it has an inverse relationship with SiO2.

Keywords

Acknowledgement

이 논문은 중소벤처기업부가 후원하는 월드클래스300 프로젝트 연구 개발(R&D) 지원사업[프로젝트 번호: S2520985]과 한국연구재단(NRF)[NRF-2020M3H4A3106001]으로부터 지원을 받아 연구되었습니다.

References

  1. Park, E. K., Lee, H -K. (2020), "Fabrication of Plasma Resistance Y2O3-Al2O3-SiO2 Coating Ceramics by Melt-Coating Methods", Korea J. Mater. Res, Vol. 30, No. 7.
  2. Kim, D. -M., Jang, M. -R., Oh, Y. -S., Lee, S. -M., & Lee, S. -H. (2017), "Relative sputtering rates of oxides and fluorides of aluminum and yttrium", Surface and Coatings Technology, 309, 694-697. https://doi.org/10.1016/j.surfcoat.2016.11.007
  3. Choi, J. H., Park, H, B., Na, H., & Kim, H. -J. (2019), "Plasma corrosion resistance of RO-Al2O3-SiO2(R: Alkaline earth) under fluorocarbon plasma with Ar+: II. Plasma resistant glass", Corrosion Science, 146, 247-253. https://doi.org/10.1016/j.corsci.2018.10.015
  4. Lee, J., Kim, D., Lee, S., & Kim. H. (2012), "Effect of rare-earth elements on the plasma etching behavior of the Re-Si-Al-O glasses", Journal of Non-Crystalline Solids, 358(5), 898-902. https://doi.org/10.1016/j.jnoncrysol.2011.12.082
  5. Choi, J. H., Na, H., Park, J., & Kim, H. -J. (2019), "Plasma corrosion resistance of Aluminosilicate glasses containing Ca, Y and B under fluorocarbon plasma with Ar+", Journal of Non-Crystalline Solids, 521, 119486. https://doi.org/10.1016/j.jnoncrysol.2019.119486
  6. Park, J., J H Choi., Na, H., & Kim, H. -J. (2021), "Effect of CaF2 on fluorocarbon plasma resistance and thermal properties of CaO-Al2O3-SiO2 glasses", Journal of Asian Ceramic Societies, Vol. 9, No. 1, 311-317.
  7. S. B. Lee., MINITAB Release 17, eretech, Korea(2017).
  8. Na, H., Park, J., Choi, S. -C., & Kim H. -J. (2019), "The effect of composition of plasma resistance of CaO-Al2O3-SiO2 glasses under Fluorocarbon Plasma with Ar+", Applied Surface Science, 476, 663-667. https://doi.org/10.1016/j.apsusc.2019.01.133
  9. Park, J., Na, H., Park, J -H, D. -G., Choi, S. -C, Kim, H. -J. (2020), "Divalent ion mixed effect of calcium aluminosilicate glasses(CAS) on thermal properties and fluorocarbon plasma resistance", Journal of Non-Crystalline Solids, 533, 119897. https://doi.org/10.1016/j.jnoncrysol.2020.119897
  10. Salman, S. M., & Salama, S. N. (1985), "Thermal expansion data of some alkali aluminosilicate glassed and their respective glass-ceramics", Thermochimica Acta, 90, 261-276. https://doi.org/10.1016/0040-6031(85)87104-5
  11. Kjeldsen, J., Smedskjaer, M. Mauro, J, C., Youngman, R. E., Huang, L., & Yue, Y. (2013), "Mixed alkaline earth effect in sodium aluminosilicate glasses", Journal of Non-Crystalline Solids, 369, 61-68. https://doi.org/10.1016/j.jnoncrysol.2013.03.015
  12. G. Y. Yeom., Plasma Etching Technology (in Korean), p. 20, YOUNG, Korea(2012).
  13. K-B. Kim, D-M. Kim, Lee, J., Y-S. Oh., H-T. Kim., H-S. Kim. & S-M. Lee, "Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis", Jounral of the Korean Ceramic Society, Vol. 46, No. 5, pp 456-461, 2009. https://doi.org/10.4191/KCERS.2009.46.5.456
  14. M. W. chase, NIST-JANAF Thermochemical tables, fourth edition, J. Phys. Chem. Ref Data 9(1998) 1-1951 Monograph. https://doi.org/10.1063/1.555617