Current Optics and Photonics

Optical Society of Korea (한국광학회)
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Polarization Maintaining Dichroic Beam-splitter and Its Surface Shape Control by Back Side AR Coating

  • Ma, Chong (Shanghai Institute of Technical Physics, Chinese Academy of Sciences) ;
  • Chen, Gang (Shanghai Institute of Technical Physics, Chinese Academy of Sciences) ;
  • Liu, Dingquan (Shanghai Institute of Technical Physics, Chinese Academy of Sciences) ;
  • Zhang, Rongjun (Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University) ;
  • He, Junbo (Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University) ;
  • Zhu, Xudan (Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University) ;
  • Li, Daqi (Shanghai Institute of Technical Physics, Chinese Academy of Sciences)
  • Received : 2021.04.28
  • Accepted : 2021.06.15
  • Published : 2021.10.25
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Abstract

Dichroic beam-splitter (DBS) with polarization-maintaining took an important role in the free space quantum telecommunication tests on the Micius satellite of China. In this presentation, we designed and prepared a 50 layer polarization-maintaining DBS coating by a dual ion beam sputtering deposition (Dual-IBS) method. In order to solve a stress problem, an 18 layer special anti-reflection (AR) coating with similar physical thickness ratio was deposited on the backside. By stress compensation, the surface flatness RMS value of the DBS sample decreased from 0.341 λ (@632.8 nm) to 0.103 λ while beam splitting and polarization maintaining properties were almost kept unchanged. Further, we discussed the mechanism of film stress and stress compensation by equation deduction and found that total stress had a strong relationship with the total physical thickness and the ratio of layer materials.

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References

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