센서학회지 (Journal of Sensor Science and Technology)

  • 제31권6호
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  • Pages.455-460
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  • 2022
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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ZnO 기반 NO2 가스센서의 MgZnO와 MgO을 통한 성능 향상에 대한 연구

Study on the Performance Improvement of ZnO-based NO2 Gas Sensor through MgZnO and MgO

  • 박소영 (부산대학교 전기전자공학과) ;
  • 이세형 (부산대학교 전기전자공학과) ;
  • 박찬영 (부산대학교 전기전자공학과) ;
  • 백동기 (부산대학교 전기전자공학과) ;
  • 이문석 (부산대학교 전기전자공학과)
  • So-Young, Bak (School of Electronics Engineering, Busan National Unversity) ;
  • Se-Hyeong, Lee (School of Electronics Engineering, Busan National Unversity) ;
  • Chan-Yeong, Park (School of Electronics Engineering, Busan National Unversity) ;
  • Dongki, Baek (School of Electronics Engineering, Busan National Unversity) ;
  • Moonsuk, Yi (School of Electronics Engineering, Busan National Unversity)
  • 투고 : 2022.11.14
  • 심사 : 2022.11.30
  • 발행 : 2022.11.30
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초록

Brush-like ZnO hierarchical nanostructures decorated with MgxZn1-xO (x = 0.1, 0.2, 0.3, 0.4, and 0.5) were fabricated and examined for application to a gas sensor. They were synthesized using vapor phase growth (VPG) on indium tin oxide (ITO) substrates. To generate electronic accumulation at ZnO surface, MgZnO nanoparticles were prepared by sol-gel method, and the ratio of Mg and Zn was adjusted to optimize the device for NO2 gas detection. As the electrons in the accumulation layer generated by the heterojunction reacted faster and more frequently with the gas, the sensitivity and speed improved. When tested as sensing materials for gas sensors at 100 ppm NO2 at 300℃, these MgZnO decorated ZnO nanostructures exhibited an improvement from 165 to 514 times compared to pristine ZnO. The response and recovery time of the MgZnO decorated ZnO samples were shorter than those of the pristine ZnO. Various analyzing techniques, including field-emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDS), and X-ray powder diffraction (XRD) were employed to confirm the growth morphology, atomic composition, and crystalline information of the samples, respectively.

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과제정보

이 과제는 부산대학교 기본연구지원사업(2년)에 의하여 연구되었음.

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